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Influence of running accuracy of ruling carriage system on grating spectrum performance
Yang C.; Yu H.-L.; Feng S.-L.; Li X.-T.; Qi X.-D.; Jiang S.; Tang Y.-G.
2014
发表期刊Guangxue Jingmi Gongcheng/Optics and Precision Engineering
ISSNISBN/1004924X
卷号22期号:10页码:2674-2682
摘要A grating diffractive spectral imaging model with ruling line bend and ruling line position errors was established based on the Fresnel-Kirchhoff diffraction theory, and the effect of these errors mentioned above on grating spectral properties was analyzed. For the instability of ruling carriage system, an optical measuring system was designed, and a mechanical improvement for the ruling carriage system was proposed.It was implemented by adopting a bilateral flexible hinge structure to replace the fixed linking method of original saddle slider pattern and ruling carriage system. Finally, The experiments on the stability test of ruling carriage system and the grating ruling test were performed. The experiment on the stability test of ruling carriage system shows that running stability of the improved score tool holder system is improved significantly as compared to that before improvement, and the displacement curve repeatability error (PV value) has reduced from 127 nm to 13 nm, decreased about 89%. Moreover, the grating ruling experiment shows that the grating spectrum performance after improving ruling carriage system has improved greatly, and the stray light has been effectively suppressed. These results obtained are in agreement with that of simulation, and provides theory and technological bases for improving grating ruling quality.
收录类别EI
语种中文
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/44084
专题中科院长春光机所知识产出
推荐引用方式
GB/T 7714
Yang C.,Yu H.-L.,Feng S.-L.,et al. Influence of running accuracy of ruling carriage system on grating spectrum performance[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2014,22(10):2674-2682.
APA Yang C..,Yu H.-L..,Feng S.-L..,Li X.-T..,Qi X.-D..,...&Tang Y.-G..(2014).Influence of running accuracy of ruling carriage system on grating spectrum performance.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,22(10),2674-2682.
MLA Yang C.,et al."Influence of running accuracy of ruling carriage system on grating spectrum performance".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 22.10(2014):2674-2682.
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