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| Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 8
作者: Kuang, S.-Q.; C. Zhang; Y.-M. Wang; X.-Y. Zhou and Y. Xie
 浏览 |  Adobe PDF(867Kb) |  收藏 | 浏览/下载：298/91 | 提交时间：2018/06/13 |
| Characterization of periodic extreme ultraviolet multilayer based on multi-objective evolutionary algorithm 期刊论文
Journal of Applied Physics, 2017, 卷号: 122, 期号: 18
作者: Kuang, S. Q.; X. P. Gong and H. G. Yang
浏览 | Adobe PDF(1617Kb) | 收藏 | 浏览/下载：323/100 | 提交时间：2018/06/13 |
| Aplanatic zone plate embedded in sapphire 期刊论文
, 2017
作者: Tian, Z.-N.; J.-G. Hua; F. Yu; Y.-H. Yu; H. Liu; Q.-D. Chen and H.-B. Sun
浏览 | Adobe PDF(756Kb) | 收藏 | 浏览/下载：229/73 | 提交时间：2018/06/13 |
| Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography 期刊论文
Applied Surface Science, 2017, 卷号: 425
作者: Xue, C. F.; J. Zhao; Y. Q. Wu; H. N. Yu; S. M. Yang; L. S. Wang; W. C. Zhao; Q. Wu; Z. C. Zhu; B. Liu; X. Zhang; W. C. Zhou and R. Z. Tai
浏览 | Adobe PDF(1187Kb) | 收藏 | 浏览/下载：339/96 | 提交时间：2018/06/13 |
| Model of resonant high harmonic generation in multi-electron systems 期刊论文
Journal of Physics B-Atomic Molecular and Optical Physics, 2017, 卷号: 50, 期号: 18
作者: Redkin, P. V. and R. A. Ganeev
浏览 | Adobe PDF(1097Kb) | 收藏 | 浏览/下载：284/109 | 提交时间：2018/06/13 |
| Impact of carbon contamination cleaning technologies on reflectivity of extreme ultraviolet lithography optics 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 3
作者: Wang, Y.; Q. Lu and Y. Gao
浏览 | Adobe PDF(284Kb) | 收藏 | 浏览/下载：354/109 | 提交时间：2018/06/13 |
| Cleaning of carbon contamination on multilayer optics of EUVL 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 11
作者: Song, Y.; Q.-P. Lu; X.-P. Gong; Y. Wang and Z.-Q. Peng
浏览 | Adobe PDF(603Kb) | 收藏 | 浏览/下载：308/107 | 提交时间：2018/06/13 |
| Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2017, 卷号: 37, 期号: 6
作者: Zhang, C.; J. Zhang; Y. Wang; S. Kuang and Y. Xie
浏览 | Adobe PDF(1065Kb) | 收藏 | 浏览/下载：296/81 | 提交时间：2018/06/13 |
| Extended shift-rotation method for absolute interferometric testing of a spherical surface with pixel-level spatial resolution 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 16
作者: Liu, Y.; L. Miao; W. L. Zhang; C. S. Jin and H. T. Zhang
浏览 | Adobe PDF(909Kb) | 收藏 | 浏览/下载：327/84 | 提交时间：2018/06/13 |
| Beam drift error and control technology for scanning beam interference lithography 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 14
作者: Wang, W.; Y. Song; S. Jiang; M. Z. Pan and Bayanheshing
浏览 | Adobe PDF(1710Kb) | 收藏 | 浏览/下载：260/72 | 提交时间：2018/06/13 |
