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Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography 期刊论文
Applied Surface Science, 2017, 卷号: 425
Authors:  Xue, C. F.;  J. Zhao;  Y. Q. Wu;  H. N. Yu;  S. M. Yang;  L. S. Wang;  W. C. Zhao;  Q. Wu;  Z. C. Zhu;  B. Liu;  X. Zhang;  W. C. Zhou and R. Z. Tai
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