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Characterization of periodic extreme ultraviolet multilayer based on multi-objective evolutionary algorithm
Kuang, S. Q.; X. P. Gong and H. G. Yang
2017
发表期刊Journal of Applied Physics
卷号122期号:18
摘要In order to refine the layered structure of extreme ultraviolet multilayers, a multi-objective evolutionary algorithm which is post-hybridized with the standard Levenberg-Marquardt algorithm is applied to analyze the grazing incidence X-ray reflectivity (GIXR) and the normal incidence extreme ultraviolet reflectance (EUVR). In this procedure, the GIXR data and EUVR data are simultaneously fitted as two objectives, and the high sensitivities of these two sets of data to layer thicknesses and densities are combined. This set of mathematical procedures is conducive to obtain a more correct model of periodic multilayers which can simultaneously describe both GIXR and EUVR measurements. As a result, the layered structure of Mo/Si multilayers with a period of about 7.0 nm is obtained. Published by AIP Publishing.
收录类别sci ; ei
语种英语
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/58978
专题中科院长春光机所知识产出
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Kuang, S. Q.,X. P. Gong and H. G. Yang. Characterization of periodic extreme ultraviolet multilayer based on multi-objective evolutionary algorithm[J]. Journal of Applied Physics,2017,122(18).
APA Kuang, S. Q.,&X. P. Gong and H. G. Yang.(2017).Characterization of periodic extreme ultraviolet multilayer based on multi-objective evolutionary algorithm.Journal of Applied Physics,122(18).
MLA Kuang, S. Q.,et al."Characterization of periodic extreme ultraviolet multilayer based on multi-objective evolutionary algorithm".Journal of Applied Physics 122.18(2017).
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