Characterization of periodic extreme ultraviolet multilayer based on multi-objective evolutionary algorithm

	Characterization of periodic extreme ultraviolet multilayer based on multi-objective evolutionary algorithm
	Kuang, S. Q.; X. P. Gong and H. G. Yang
	2017
发表期刊	Journal of Applied Physics
卷号	122 期号:18
摘要	In order to refine the layered structure of extreme ultraviolet multilayers, a multi-objective evolutionary algorithm which is post-hybridized with the standard Levenberg-Marquardt algorithm is applied to analyze the grazing incidence X-ray reflectivity (GIXR) and the normal incidence extreme ultraviolet reflectance (EUVR). In this procedure, the GIXR data and EUVR data are simultaneously fitted as two objectives, and the high sensitivities of these two sets of data to layer thicknesses and densities are combined. This set of mathematical procedures is conducive to obtain a more correct model of periodic multilayers which can simultaneously describe both GIXR and EUVR measurements. As a result, the layered structure of Mo/Si multilayers with a period of about 7.0 nm is obtained. Published by AIP Publishing.
收录类别	sci ; ei
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/58978
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Kuang, S. Q.,X. P. Gong and H. G. Yang. Characterization of periodic extreme ultraviolet multilayer based on multi-objective evolutionary algorithm[J]. Journal of Applied Physics,2017,122(18).
APA	Kuang, S. Q.,&X. P. Gong and H. G. Yang.(2017).Characterization of periodic extreme ultraviolet multilayer based on multi-objective evolutionary algorithm.Journal of Applied Physics,122(18).
MLA	Kuang, S. Q.,et al."Characterization of periodic extreme ultraviolet multilayer based on multi-objective evolutionary algorithm".Journal of Applied Physics 122.18(2017).

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