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Research Progress on Near-Infrared High-Power Laser Damage of Liquid Crystal Optical Devices 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2020, 卷号: 47, 期号: 1, 页码: 14
作者:  X. Liu,L. Peng,Y. Zhao,X. Wang,D. Li and J. Shao
浏览  |  Adobe PDF(5802Kb)  |  收藏  |  浏览/下载：164/55  |  提交时间：2021/07/06
Interference Fringe Locking by Grating-Shifting Holographic Grating Exposure 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 5
作者:  Song, Y.;  X. Zhao;  Y. Jiang;  Bayanheshig and X. Qi
浏览  |  Adobe PDF(528Kb)  |  收藏  |  浏览/下载：310/94  |  提交时间：2018/06/13
Impact of carbon contamination cleaning technologies on reflectivity of extreme ultraviolet lithography optics 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 3
作者:  Wang, Y.;  Q. Lu and Y. Gao
浏览  |  Adobe PDF(284Kb)  |  收藏  |  浏览/下载：347/106  |  提交时间：2018/06/13
Research on temperature distribution of deep ultraviolet lithographic projection objective 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 5
作者:  Yao, C. and Y. Gong
浏览  |  Adobe PDF(8729Kb)  |  收藏  |  浏览/下载：285/109  |  提交时间：2017/09/11
Design and fabrication of broadband Mo/Si multilayer films for extreme ultra violet lithography illumination system 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 4
作者:  Yu, B.;  C. Li;  C. Jin and C. Wang
浏览  |  Adobe PDF(1342Kb)  |  收藏  |  浏览/下载：320/62  |  提交时间：2017/09/11
Measurement of thickness uniformity of optic multilayer based on surface figure measurement 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2015, 卷号: 42, 期号: 7
作者:  Wang, H.;  F. Zhou;  B. Yu;  Y. Xie;  J. Yu;  Y. Liu and L. Wang
浏览  |  Adobe PDF(1398Kb)  |  收藏  |  浏览/下载：296/92  |  提交时间：2016/08/24
Design and analysis of diamond carrier aerostatic guideway in large diffraction grating ruling engine 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2015, 卷号: 42, 期号: 4
作者:  Song, N.;  S. Feng;  H. Yu;  X. Qi;  Bayanheshig and Y. Tang
浏览  |  Adobe PDF(1451Kb)  |  收藏  |  浏览/下载：331/67  |  提交时间：2016/08/24