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Optimization method using nodal aberration theory for coaxial imaging systems with radial basis functions based on surface slope 期刊论文
Applied Optics, 2021, 卷号: 60, 期号: 9
作者:  S. Zhang;  L. Xiao;  X. Zhao;  L. Song;  Y. Liu;  L. Wang;  G. Shi and W. Liu
浏览  |  Adobe PDF(3819Kb)  |  收藏  |  浏览/下载：161/59  |  提交时间：2022/06/13
Heterodyne period measurement in a scanning beam interference lithography system 期刊论文
Applied Optics, 2020, 卷号: 59, 期号: 19, 页码: 5830-5836
作者:  S. Jiang,B. Lu,Y. Song,Z. W. Liu,W. Wang,L. Shuo and Bayanheshig
Adobe PDF(1356Kb)  |  收藏  |  浏览/下载：158/42  |  提交时间：2021/07/06
Weighted iterative algorithm for beam alignment in scanning beam interference lithography 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 31
作者:  Song, Y.;  W. Wang;  S. Jiang;  Bayanheshig and N. Zhang
Adobe PDF(1461Kb)  |  收藏  |  浏览/下载：245/72  |  提交时间：2018/06/13
Beam drift error and control technology for scanning beam interference lithography 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 14
作者:  Wang, W.;  Y. Song;  S. Jiang;  M. Z. Pan and Bayanheshing
Adobe PDF(1710Kb)  |  收藏  |  浏览/下载：267/75  |  提交时间：2018/06/13
Moire alignment algorithm for an aberration-corrected holographic grating exposure system and error analysis 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 31
作者:  Zhao, X. L.;  Bayanheshig;  W. H. Li;  Y. X. Jiang;  Y. Song;  X. T. Li;  S. Jiang and N. Wu
Adobe PDF(1191Kb)  |  收藏  |  浏览/下载：308/72  |  提交时间：2017/09/11