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Analysis of ArF excimer laser system discharge characteristics in different buffer gases 期刊论文
Acta Physica Sinica, 2020, 卷号: 69, 期号: 17, 页码: 8
作者:  Q. Wang, J. S. Zhao, Y. Y. Fan, X. Guo and Y. Zhou
浏览  |  Adobe PDF(1306Kb)  |  收藏  |  浏览/下载：173/50  |  提交时间：2021/07/06
Design of a multimode interference waveguide semiconductor laser combining gain coupled distributed feedback grating 期刊论文
Acta Physica Sinica, 2019, 卷号: 68, 期号: 16, 页码: 10
作者:  C.Qiu;  Y.Y.Chen;  F.Gao;  L.Qin;  L.J.Wang
浏览  |  Adobe PDF(1310Kb)  |  收藏  |  浏览/下载：198/57  |  提交时间：2020/08/24
distributed feedback grating,active multimode interference waveguide,edgeemitting semiconductor laser diode,wavelength tuning range,dfb,lidar,Physics  
Key technology progress of optomechanical systems in 193 nm projection objective 期刊论文
Zhongguo Kexue Jishu Kexue/Scientia Sinica Technologica, 2017, 卷号: 47, 期号: 6
作者:  Zhang, D.;  X. Li;  D. Rui;  P. Li;  L. Dong and J. Zhang
caj(2036Kb)  |  收藏  |  浏览/下载：292/103  |  提交时间：2018/06/13
Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 8
作者:  Kuang, S.-Q.;  C. Zhang;  Y.-M. Wang;  X.-Y. Zhou and Y. Xie
浏览  |  Adobe PDF(867Kb)  |  收藏  |  浏览/下载：309/98  |  提交时间：2018/06/13
Design and experiment of active compensation system for thermal aberration of lithographic lens 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2017, 卷号: 37, 期号: 3
作者:  Dong, L.;  Q. Cui;  P. Li and L. Zhao
浏览  |  Adobe PDF(4130Kb)  |  收藏  |  浏览/下载：350/112  |  提交时间：2018/06/13
Interference Fringe Locking by Grating-Shifting Holographic Grating Exposure 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 5
作者:  Song, Y.;  X. Zhao;  Y. Jiang;  Bayanheshig and X. Qi
浏览  |  Adobe PDF(528Kb)  |  收藏  |  浏览/下载：327/102  |  提交时间：2018/06/13
Optimization of Circular-axis Flexure Hinge by Considering Material Selection and Geometrical Configuration Simultaneously 期刊论文
Jixie Gongcheng Xuebao/Journal of Mechanical Engineering, 2017, 卷号: 53, 期号: 9
作者:  Cao, Y.;  Z. Wang;  C. Zhou and W. Wang
浏览  |  Adobe PDF(1273Kb)  |  收藏  |  浏览/下载：312/115  |  提交时间：2018/06/08
Advances in high power high beam quality diode lasers 期刊论文
Kexue Tongbao/Chinese Science Bulletin, 2017, 卷号: 62, 期号: 32
作者:  Zhang, J.;  Y. Chen;  L. Qin;  H. Peng;  Y. Ning and L. Wang
浏览  |  Adobe PDF(1769Kb)  |  收藏  |  浏览/下载：450/205  |  提交时间：2018/06/13
Watt-class low divergence 2 mu m GaSb based broad-area quantum well lasers 期刊论文
Journal of Infrared and Millimeter Waves, 2017, 卷号: 36, 期号: 3
作者:  Xing, E. B.;  J. M. Rong;  Y. Zhang;  C. Z. Tong;  S. C. Tian;  L. J. Wang;  S. L. Shu;  Z. F. Lu;  Z. C. Niu and L. J. Wang
浏览  |  Adobe PDF(1356Kb)  |  收藏  |  浏览/下载：308/104  |  提交时间：2018/06/13
Electrostatic field assisted micro imprint lithography technology 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 3
作者:  Liu, M.-Z.;  T.-S. Wang;  H.-F. Li;  Z.-Y. Liu;  Z.-L. Chen and W.-X. Yu
浏览  |  Adobe PDF(947Kb)  |  收藏  |  浏览/下载：336/87  |  提交时间：2018/06/13