Design and experiment of active compensation system for thermal aberration of lithographic lens

	Design and experiment of active compensation system for thermal aberration of lithographic lens
	Dong, L.; Q. Cui; P. Li and L. Zhao
	2017
发表期刊	Guangxue Xuebao/Acta Optica Sinica
卷号	37 期号:3
摘要	The astigmatism Z5in the etching process of lithographic lens silicon wafer can greatly deteriorate wave aberration of the lithographic lens. In order to compensate the astigmatism in real time, this paper proposes an astigmatism active Z5compensation system that includes real time data platform, actuator system, flexible supporting structure and optical lens. The sphere interferometer is used as test equipment for optical lens surface shape. The least square method and the linear superposition principle are both used to determine the relationship between actuate parameter and surface shape. The experiments, including test of response function of actuator in active compensation system, test of compensation stroke, test of compensation precision, test of compensation resolution, are conducted. The results show that the astigmatism Z5compensation stroke of the system is up to 735 nm. The astigmatism Z5compensation precision is less than 2 nm with the high-order aberration less than 1 nm. The astigmatism Z5compensation resolution is 2 nm. The system can effectively compensate the wave aberration in the lithographic lens system and satisfy the image quality requirement of lithographic lens. 2017, Chinese Lasers Press. All right reserved.
收录类别	ei
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/58881
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Dong, L.,Q. Cui,P. Li and L. Zhao. Design and experiment of active compensation system for thermal aberration of lithographic lens[J]. Guangxue Xuebao/Acta Optica Sinica,2017,37(3).
APA	Dong, L.,Q. Cui,&P. Li and L. Zhao.(2017).Design and experiment of active compensation system for thermal aberration of lithographic lens.Guangxue Xuebao/Acta Optica Sinica,37(3).
MLA	Dong, L.,et al."Design and experiment of active compensation system for thermal aberration of lithographic lens".Guangxue Xuebao/Acta Optica Sinica 37.3(2017).

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