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Low-stress and high-reflectance Mo/Si multilayers for extreme ultraviolet lithography by magnetron sputtering deposition with bias assistance 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 26
作者:  Yu, B.;  C. S. Jin;  S. Yao;  C. Li;  Y. Liu;  F. Zhou;  B. Y. Guo;  H. Wang;  Y. Xie and L. P. Wang
Adobe PDF(1006Kb)  |  收藏  |  浏览/下载：291/104  |  提交时间：2018/06/13
Mechanism of p-type conductivity for phosphorus-doped ZnO thin film 期刊论文
Journal of Physics D-Applied Physics, 2009, 卷号: 42, 期号: 1
作者:  Yao B.;  Xie Y. P.;  Cong C. X.;  Zhao H. J.;  Sui Y. R.;  Yang T.;  He Q.
Adobe PDF(133Kb)  |  收藏  |  浏览/下载：821/185  |  提交时间：2012/10/21
Effect of annealing on conductivity behavior of undoped zinc oxide prepared by rf magnetron sputtering 期刊论文
Journal of Alloys and Compounds, 2008, 卷号: 457, 期号: 1—2, 页码: 36-41
作者:  Xing G. Z.;  Yao B.;  Cong C. X.;  Yang T.;  Xie Y. P.;  Li B. H.;  Shen D. Z.
Adobe PDF(675Kb)  |  收藏  |  浏览/下载：677/177  |  提交时间：2012/10/21
Nitrogen partial pressure-dependent Mg concentration, structure, and optical properties of MgxZn1-xO film grown by magnetron sputtering 期刊论文
Journal of Materials Research, 2007, 卷号: 22, 期号: 10, 页码: 2936-2942
作者:  Cong C. X.;  Yao B.;  Xie Y. P.;  Xing G. Z.;  Li B. H.;  Wang X. H.;  Wei Z. P.;  Zhang Z. Z.;  Lv Y. M.;  Shen D. Z.;  Fan X. W.
Adobe PDF(725Kb)  |  收藏  |  浏览/下载：512/128  |  提交时间：2012/10/21
P-type conductivity and stability of nitrogen-doped zinc oxide prepared by magnetron sputtering 期刊论文
Journal of Luminescence, 2007, 卷号: 122, 页码: 191-194
作者:  Yao B.;  Guan L. X.;  Xing G. Z.;  Zhang Z. Z.;  Li B. H.;  Wei Z. P.;  Wang X. H.;  Cong C. X.;  Xie Y. P.;  Lu Y. M.;  Shen D. Z.
Adobe PDF(155Kb)  |  收藏  |  浏览/下载：526/127  |  提交时间：2012/10/21
Control of structure, conduction behavior, and band gap of Zn1-xMgxO films by nitrogen partial pressure ratio of sputtering gases 期刊论文
Applied Physics Letters, 2006, 卷号: 89, 期号: 26
作者:  Cong C. X.;  Yao B.;  Xing G. Z.;  Xie Y. P.;  Guan L. X.;  Li B. H.;  Wang X. H.;  Wei Z. P.;  Zhang Z. Z.;  Lv Y. M.;  Shen D. Z.;  Fan X. W.
Adobe PDF(313Kb)  |  收藏  |  浏览/下载：468/78  |  提交时间：2012/10/21
Effects of nitrogen doping and illumination on lattice constants and conductivity behavior of zinc oxide grown by magnetron sputtering 期刊论文
Journal of Applied Physics, 2006, 卷号: 99, 期号: 12
作者:  Yao B.;  Shen D. Z.;  Zhang Z. Z.;  Wang X. H.;  Wei Z. P.;  Li B. H.;  Lv Y. M.;  Fan X. W.;  Guan L. X.;  Xing G. Z.;  Cong C. X.;  Xie Y. P.
Adobe PDF(341Kb)  |  收藏  |  浏览/下载：518/106  |  提交时间：2013/03/27