Effect of annealing on conductivity behavior of undoped zinc oxide prepared by rf magnetron sputtering

	Effect of annealing on conductivity behavior of undoped zinc oxide prepared by rf magnetron sputtering
其他题名	论文其他题名
	Xing G. Z.; Yao B.; Cong C. X.; Yang T.; Xie Y. P.; Li B. H.; Shen D. Z.
	2008
发表期刊	Journal of Alloys and Compounds
ISSN	0925-8388
卷号	457 期号:1—2 页码:36-41
摘要	An undoped ZnO thin film with high resistivity was prepared by rf magnetron sputtering on the quartz substrates using a ZnO (99.999% pure) as target and high pure Ar as sputtering gas. Upon annealing in a temperature range from 513 to 923 K under 10(-3) Pa, the conductive properties of the film change from high resistivity, to n-type, then to p-type and finally to n-type with increasing annealing temperature and the p-type ZnO film was fabricated near 863 K reproducibly. Temperature-dependent photoluminescence (PL) of the p-type ZnO shows a dominant PL band at 3.072 eV at low temperature, which is related to Zn vacancy (V(Zn)) acceptor. The intensity of the 3.072 eV band decreases with increasing temperature, implying increment of amount of the hole induced by V(Zn). X-ray photoelectron spectroscopy (XPS) and room temperature PL measurements indicate that the undoped ZnO is Zn-rich and has oxygen vacancy (V(o)) and interstitial Zn (Zn(i)) donor defects. The amount of V(o) and Zn(i) donors changes with the annealing temperature. The intrinsic p-type conduction of the undoped ZnO film is ascribed to that the V(Zn) acceptor concentration can compensate V(o) and Zn(i) donor concentration. (C) 2007 Elsevier B.V. All rights reserved.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26488
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Xing G. Z.,Yao B.,Cong C. X.,et al. Effect of annealing on conductivity behavior of undoped zinc oxide prepared by rf magnetron sputtering[J]. Journal of Alloys and Compounds,2008,457(1—2):36-41.
APA	Xing G. Z..,Yao B..,Cong C. X..,Yang T..,Xie Y. P..,...&Shen D. Z..(2008).Effect of annealing on conductivity behavior of undoped zinc oxide prepared by rf magnetron sputtering.Journal of Alloys and Compounds,457(1—2),36-41.
MLA	Xing G. Z.,et al."Effect of annealing on conductivity behavior of undoped zinc oxide prepared by rf magnetron sputtering".Journal of Alloys and Compounds 457.1—2(2008):36-41.

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