Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Effects of nitrogen doping and illumination on lattice constants and conductivity behavior of zinc oxide grown by magnetron sputtering | |
Yao B.; Shen D. Z.; Zhang Z. Z.; Wang X. H.; Wei Z. P.; Li B. H.; Lv Y. M.; Fan X. W.; Guan L. X.; Xing G. Z.; Cong C. X.; Xie Y. P. | |
2006 | |
发表期刊 | Journal of Applied Physics |
ISSN | 0021-8979 |
卷号 | 99期号:12 |
摘要 | A yellow-orange nitrogen-doped zinc oxide (ZnO:N) film was deposited on a quartz glass substrate at 510 K by reactive radio-frequency magnetron sputtering of a ZnO target with sputtering gas of nitrogen. The lattice constants of the as-grown ZnO:N are much larger than those of undoped ZnO, and decrease with increasing annealing temperature due to escape of the nitrogen from the ZnO:N and decrease of tensile stress, accompanied with color change from yellow-orange to pale yellow. The nitrogen occupies two chemical environments in the ZnO:N based on x-ray photoelectron spectroscopy measurement. One is N-O acceptor formed by substitution of N atom for O sublattice, and another is (N-2)(O) double donors produced by substitution of N molecular for O site, which make the lattice constants expanded. The as-grown ZnO:N film shows insulating, but behaves p-type conduction in the dark after annealed at 863 K for 1 h under 10(-3) Pa. Unfortunately, the p-type conduction is not stable and reverts to n type soon. However, after illuminated by sunlight for several minutes, the n-type ZnO:N transforms into p type again. The mechanism of the transformation of the conductivity behavior is discussed in the present work. |
收录类别 | SCI ; EI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/34117 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Yao B.,Shen D. Z.,Zhang Z. Z.,et al. Effects of nitrogen doping and illumination on lattice constants and conductivity behavior of zinc oxide grown by magnetron sputtering[J]. Journal of Applied Physics,2006,99(12). |
APA | Yao B..,Shen D. Z..,Zhang Z. Z..,Wang X. H..,Wei Z. P..,...&Xie Y. P..(2006).Effects of nitrogen doping and illumination on lattice constants and conductivity behavior of zinc oxide grown by magnetron sputtering.Journal of Applied Physics,99(12). |
MLA | Yao B.,et al."Effects of nitrogen doping and illumination on lattice constants and conductivity behavior of zinc oxide grown by magnetron sputtering".Journal of Applied Physics 99.12(2006). |
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