Effects of nitrogen doping and illumination on lattice constants and conductivity behavior of zinc oxide grown by magnetron sputtering

	Effects of nitrogen doping and illumination on lattice constants and conductivity behavior of zinc oxide grown by magnetron sputtering
	Yao B.; Shen D. Z.; Zhang Z. Z.; Wang X. H.; Wei Z. P.; Li B. H.; Lv Y. M.; Fan X. W.; Guan L. X.; Xing G. Z.; Cong C. X.; Xie Y. P.
	2006
发表期刊	Journal of Applied Physics
ISSN	0021-8979
卷号	99 期号:12
摘要	A yellow-orange nitrogen-doped zinc oxide (ZnO:N) film was deposited on a quartz glass substrate at 510 K by reactive radio-frequency magnetron sputtering of a ZnO target with sputtering gas of nitrogen. The lattice constants of the as-grown ZnO:N are much larger than those of undoped ZnO, and decrease with increasing annealing temperature due to escape of the nitrogen from the ZnO:N and decrease of tensile stress, accompanied with color change from yellow-orange to pale yellow. The nitrogen occupies two chemical environments in the ZnO:N based on x-ray photoelectron spectroscopy measurement. One is N-O acceptor formed by substitution of N atom for O sublattice, and another is (N-2)(O) double donors produced by substitution of N molecular for O site, which make the lattice constants expanded. The as-grown ZnO:N film shows insulating, but behaves p-type conduction in the dark after annealed at 863 K for 1 h under 10(-3) Pa. Unfortunately, the p-type conduction is not stable and reverts to n type soon. However, after illuminated by sunlight for several minutes, the n-type ZnO:N transforms into p type again. The mechanism of the transformation of the conductivity behavior is discussed in the present work.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/34117
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Yao B.,Shen D. Z.,Zhang Z. Z.,et al. Effects of nitrogen doping and illumination on lattice constants and conductivity behavior of zinc oxide grown by magnetron sputtering[J]. Journal of Applied Physics,2006,99(12).
APA	Yao B..,Shen D. Z..,Zhang Z. Z..,Wang X. H..,Wei Z. P..,...&Xie Y. P..(2006).Effects of nitrogen doping and illumination on lattice constants and conductivity behavior of zinc oxide grown by magnetron sputtering.Journal of Applied Physics,99(12).
MLA	Yao B.,et al."Effects of nitrogen doping and illumination on lattice constants and conductivity behavior of zinc oxide grown by magnetron sputtering".Journal of Applied Physics 99.12(2006).

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