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Simple and compact grating-based heterodyne interferometer with the Littrow configuration for high-accuracy and long-range measurement of two-dimensional displacement 期刊论文
APPLIED OPTICS, 2018, 卷号: 57, 期号: 31, 页码: 9455-9463
Authors:  Lv, Qiang;  Liu, Zhaowu;  Wang, Wei;  Li, Xiaotian;  Li, Shuo;  Song, Ying;  Yu, Hongzhu;  Bayanheshig;  Li, Wenhao
View  |  Adobe PDF(1611Kb)  |  Favorite  |  View/Download:72/30  |  Submit date:2019/08/26
laser  nonlinearity  encoder  errors  stage  Optics  
平面反射光栅衍射效率自动测试仪的设计与分析 期刊论文
光谱学与光谱分析, 2009, 卷号: 2, 期号: 29, 页码: 556
Authors:  齐向东;  于宏柱
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