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Calibration of VUV spectroradiometers for space exploration 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2022, 卷号: 30, 期号: 7, 页码: 765-772
作者:  H. Sun;  X. Liang;  W. Ma;  J. Wang and G. Lin
浏览  |  Adobe PDF(2113Kb)  |  收藏  |  浏览/下载：83/44  |  提交时间：2023/06/14
Design and fabrication of EUV broadband multilayer mirrors with discrete thicknesses 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2018, 卷号: 26, 期号: 10, 页码: 2395-2406
作者:  Kuang, Shang-Qi;  Li, Shuo;  Yang, Hai-Gui;  Huo, Tong-Lin;  Zhou, Hong-Jun
浏览  |  Adobe PDF(985Kb)  |  收藏  |  浏览/下载：390/132  |  提交时间：2019/09/17
Multilayers  Extreme ultraviolet lithography  Fabrication  Mirrors  Reflection  
Electrostatic field assisted micro imprint lithography technology 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 3
作者:  Liu, M.-Z.;  T.-S. Wang;  H.-F. Li;  Z.-Y. Liu;  Z.-L. Chen and W.-X. Yu
浏览  |  Adobe PDF(947Kb)  |  收藏  |  浏览/下载：331/85  |  提交时间：2018/06/13
Cleaning of carbon contamination on multilayer optics of EUVL 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 11
作者:  Song, Y.;  Q.-P. Lu;  X.-P. Gong;  Y. Wang and Z.-Q. Peng
浏览  |  Adobe PDF(603Kb)  |  收藏  |  浏览/下载：311/110  |  提交时间：2018/06/13
Surface modification of 2 m RB-SiC substrate by magnetron sputtering 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 7
作者:  Liu, Z.;  J.-S. Gao;  H. Liu;  X.-Y. Wang and T.-T. Wang
Adobe PDF(1031Kb)  |  收藏  |  浏览/下载：283/87  |  提交时间：2017/09/11
Target filament accurate restoring system in high-energetic particle burst experiment 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2014, 卷号: 22, 期号: 10, 页码: 2779-2786
作者:  Zhang Y.;  Zhong X.;  Xu Z.;  Jin G.
浏览  |  Adobe PDF(1487Kb)  |  收藏  |  浏览/下载：321/74  |  提交时间：2015/04/24