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Influence of aviation low temperature on auto-collimating focusing system 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2020, 卷号: 28, 期号: 6, 页码: 1226-1235
作者:  W.-Y. Liu,Y.-L. Xu,L. Shi and Y. Yao
浏览  |  Adobe PDF(1495Kb)  |  收藏  |  浏览/下载:115/51  |  提交时间:2021/07/06
Ultra-violet picosecond fiber-solid hybrid amplification laser 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2020, 卷号: 28, 期号: 10, 页码: 2122-2128
作者:  X. Su;  J. Yao;  Y.-N. Wang;  X.-H. Yang and Q. Zheng
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Perfect tracking control for fast-steering mirror driven by voice coil motor 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2020, 卷号: 28, 期号: 9, 页码: 1997-2006
作者:  F.-C. Wang,Y.-T. Wang and D.-P. Tian
浏览  |  Adobe PDF(3952Kb)  |  收藏  |  浏览/下载:133/46  |  提交时间:2021/07/06
Design and fabrication of EUV broadband multilayer mirrors with discrete thicknesses 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2018, 卷号: 26, 期号: 10, 页码: 2395-2406
作者:  Kuang, Shang-Qi;  Li, Shuo;  Yang, Hai-Gui;  Huo, Tong-Lin;  Zhou, Hong-Jun
浏览  |  Adobe PDF(985Kb)  |  收藏  |  浏览/下载:361/120  |  提交时间:2019/09/17
Multilayers  Extreme ultraviolet lithography  Fabrication  Mirrors  Reflection  
High-precision position control of a gene sequencer motion stage 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2018, 卷号: 26, 期号: 10, 页码: 2455-2462
作者:  Fu, Yun-Bo;  Guo, Tong-Jian
浏览  |  Adobe PDF(854Kb)  |  收藏  |  浏览/下载:330/160  |  提交时间:2019/09/17
Controllers  Computer control systems  Equations of motion  Frequency domain analysis  Genes  Permanent magnets  Position control  Synchronous motors  
Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 8
作者:  Kuang, S.-Q.;  C. Zhang;  Y.-M. Wang;  X.-Y. Zhou and Y. Xie
浏览  |  Adobe PDF(867Kb)  |  收藏  |  浏览/下载:297/90  |  提交时间:2018/06/13
Electrostatic field assisted micro imprint lithography technology 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 3
作者:  Liu, M.-Z.;  T.-S. Wang;  H.-F. Li;  Z.-Y. Liu;  Z.-L. Chen and W.-X. Yu
浏览  |  Adobe PDF(947Kb)  |  收藏  |  浏览/下载:320/81  |  提交时间:2018/06/13
Cleaning of carbon contamination on multilayer optics of EUVL 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 11
作者:  Song, Y.;  Q.-P. Lu;  X.-P. Gong;  Y. Wang and Z.-Q. Peng
浏览  |  Adobe PDF(603Kb)  |  收藏  |  浏览/下载:306/106  |  提交时间:2018/06/13
Meter-scale thin film coating equipment based on meniscus-coating technology 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 1
作者:  Xu, J.;  W.-B. Xu;  H.-Y. Bu;  Z.-W. Lu;  Z.-K. Liu;  Y.-L. Hong and W.-X. Yu
浏览  |  Adobe PDF(611Kb)  |  收藏  |  浏览/下载:303/102  |  提交时间:2018/06/13
Evaluation of absorption measurement uncertainty of laser calorimeter by exponential method 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 2
作者:  Gu, Y.-Q.;  L.-C. Zhang;  X.-Y. Wu;  L. Mei and G. Shi
浏览  |  Adobe PDF(803Kb)  |  收藏  |  浏览/下载:390/65  |  提交时间:2017/09/11