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Wavelength Scanning Mechanism Design and Accuracy Analysis of Infrared Double Grating Spectrometer 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 5
作者:  Cao, D.;  G. Lin;  B. Wen and X. Liu
浏览  |  Adobe PDF(435Kb)  |  收藏  |  浏览/下载：297/126  |  提交时间：2018/06/08
Interference Fringe Locking by Grating-Shifting Holographic Grating Exposure 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 5
作者:  Song, Y.;  X. Zhao;  Y. Jiang;  Bayanheshig and X. Qi
Adobe PDF(528Kb)  |  收藏  |  浏览/下载：321/100  |  提交时间：2018/06/13
Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
作者:  Wang, W.;  S. Jiang;  Y. Song and Bayanheshig
Adobe PDF(4373Kb)  |  收藏  |  浏览/下载：284/89  |  提交时间：2018/06/13
Profile online detection for two-dimensional stage x axis mirror in scanning exposure systems 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 1
作者:  Liu, Z.;  W. Li;  Bayanheshig;  Y. Song;  S. Jiang;  X. Li and Q. Lu
Adobe PDF(420Kb)  |  收藏  |  浏览/下载：312/90  |  提交时间：2018/06/13
Precision analysis of grating replicated mosaic error based on the principle of fraunhofer 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 5
作者:  Lu, Y.;  X. Qi;  H. Yu;  X. Li;  S. Zhang;  S. Jiang and L. Yin
浏览  |  Adobe PDF(1613Kb)  |  收藏  |  浏览/下载：319/104  |  提交时间：2017/09/11
Beam alignment and convergence analysis of scanning beam interference lithography systems 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 12
作者:  Wang, W.;  Bayanheshig;  Y. Song;  S. Jiang and M. Pan
浏览  |  Adobe PDF(1920Kb)  |  收藏  |  浏览/下载：432/81  |  提交时间：2017/09/11