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| Cleaning of carbon contamination on multilayer optics of EUVL 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 11 作者: Song, Y.; Q.-P. Lu; X.-P. Gong; Y. Wang and Z.-Q. Peng 浏览  |  Adobe PDF(603Kb)  |  收藏  |  浏览/下载:312/111  |  提交时间:2018/06/13 |
| Evaluation of absorption measurement uncertainty of laser calorimeter by exponential method 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 2 作者: Gu, Y.-Q.; L.-C. Zhang; X.-Y. Wu; L. Mei and G. Shi 浏览  |  Adobe PDF(803Kb)  |  收藏  |  浏览/下载:402/70  |  提交时间:2017/09/11 |
| Surface modification of 2 m RB-SiC substrate by magnetron sputtering 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 7 作者: Liu, Z.; J.-S. Gao; H. Liu; X.-Y. Wang and T.-T. Wang 浏览  |  Adobe PDF(1031Kb)  |  收藏  |  浏览/下载:285/87  |  提交时间:2017/09/11 |
| Optical design of high-numerical aperture lithographic lenses 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 4 作者: Xu, M.-F.; W.-B. Pang; X.-R. Xu; X.-H. Wang and W. Huang 浏览  |  Adobe PDF(487Kb)  |  收藏  |  浏览/下载:320/85  |  提交时间:2017/09/11 |
| Structrual design of detector for optical elements with large aperture 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24 作者: Huang, B.; X.-L. Li and H.-Q. Yang 浏览  |  Adobe PDF(2046Kb)  |  收藏  |  浏览/下载:281/102  |  提交时间:2017/09/11 |
| Measurement of transversal magnification for reduced projection system 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 1 作者: Xie, Y.; L.-P. Wang; B.-Y. Guo; J. Wang; L. Miao; H. Wang and F. Zhou 浏览  |  Adobe PDF(645Kb)  |  收藏  |  浏览/下载:323/79  |  提交时间:2017/09/11 |
| Image motion velocity field model of space camera with large field and analysis on three-axis attitude stability of satellite 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 9 作者: Lu, P.-L.; Y.-C. Li; L.-X. Jin; G.-N. Li; Y.-N. Wu and W.-H. Wang 浏览  |  Adobe PDF(826Kb)  |  收藏  |  浏览/下载:388/111  |  提交时间:2017/09/11 |
| Sub-nanometer precision optical fabrication of CaF2materials 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 11 作者: Zhang, C.-L.; L. Xu; J. Liu; Z.-L. Ma; F. Wang; Y.-Q. Gu; L. Dai and S.-J. Peng 浏览  |  Adobe PDF(752Kb)  |  收藏  |  浏览/下载:395/111  |  提交时间:2017/09/11 |
| Linearity calibration platform of capacitive sensors 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 1 作者: Zhang, D.-F.; C. Ge; X.-L. Li; M.-Y. Ni and K. Guo 浏览  |  Adobe PDF(2131Kb)  |  收藏  |  浏览/下载:324/108  |  提交时间:2017/09/11 |
| Effect of alignment errors of reticle on distortion in lithographic projection lens 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 3 作者: Yang, W.; W. Huang and H.-B. Shang 浏览  |  Adobe PDF(1721Kb)  |  收藏  |  浏览/下载:285/81  |  提交时间:2017/09/11 |