Effect of alignment errors of reticle on distortion in lithographic projection lens

	Effect of alignment errors of reticle on distortion in lithographic projection lens
	Yang, W.; W. Huang and H.-B. Shang
	2016
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
卷号	24 期号:3
摘要	A Carbon Fiber Composite (CFC) framework was designed for a small lightweight space camera. According to the distribution characteristics of each optical element in the optical system, CFC (M40J) was chosen to accomplish the design of the framework. TC4 embedded parts were used to solve the low accuracy of the CFC framework interface problem. An integrated optimization method and the optimization strategy which combined a genetic global optimization algorithm with a downhill simplex local optimization algorithm were adopted to optimize the structure parameters of the framework. After optimization, the total weight of the CFC framework and the TC4 embedded parts is 15.6 kg, accounting for only 18.4% that of the camera. The first order frequency of the camera reaches 104.8 Hz. Finally, a mechanical environment test was performed, and the result demonstrates that the first order frequency of the camera is 102 Hz, which is consistent with the simulation result. It further verifies the rationality and correctness of the optimization result. The integrated optimization method mentioned in this paper can be applied to the structure design of other space cameras, which can greatly improve the structure design efficiency.
文章类型	期刊
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/57355
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Yang, W.,W. Huang and H.-B. Shang. Effect of alignment errors of reticle on distortion in lithographic projection lens[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2016,24(3).
APA	Yang, W.,&W. Huang and H.-B. Shang.(2016).Effect of alignment errors of reticle on distortion in lithographic projection lens.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,24(3).
MLA	Yang, W.,et al."Effect of alignment errors of reticle on distortion in lithographic projection lens".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 24.3(2016).

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Effect of alignment （1721KB）	期刊论文	作者接受稿	开放获取	CC BY-NC-SA	浏览下载