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Modeling multilayer coating profiles with defects on EUV collector with grating 期刊论文
Optical Engineering, 2019, 卷号: 58, 期号: 10, 页码: 9
作者:  S.Z.Sun;  C.S.Jin;  B.Yu;  T.Guo;  S.Yao;  W.Y.Deng;  C.Li
浏览  |  Adobe PDF(1912Kb)  |  收藏  |  浏览/下载：158/48  |  提交时间：2020/08/24
EUV collector with grating,multilayer coating profile,coating defects,deposition model,EUV reflectance,lithography,Optics  
Evaluation method of ensquared energy based on dynamic factors in gene sequencing system 期刊论文
Optical Engineering, 2019, 卷号: 58, 期号: 5, 页码: 6
作者:  Z.Y.Sun;  W.Y.Li
浏览  |  Adobe PDF(1779Kb)  |  收藏  |  浏览/下载：121/54  |  提交时间：2020/08/24
gene sequencing,fluorescence microscopy,ensquared energy,dynamic,factors,Optics  
Terahertz wave asymmetric transmission based on double-layer subwavelength dielectric grating 期刊论文
Optical Engineering, 2019, 卷号: 58, 期号: 6, 页码: 6
作者:  J.Qiu;  J.Xu;  F.Fan
浏览  |  Adobe PDF(3918Kb)  |  收藏  |  浏览/下载：134/53  |  提交时间：2020/08/24
Terahertz,asymmetric transmission,subwavelength dielectric grating,one-way transmission,light,slit,Optics