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Interference Fringe Locking by Grating-Shifting Holographic Grating Exposure 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 5
作者:  Song, Y.;  X. Zhao;  Y. Jiang;  Bayanheshig and X. Qi
浏览  |  Adobe PDF(528Kb)  |  收藏  |  浏览/下载：334/105  |  提交时间：2018/06/13
Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
作者:  Wang, W.;  S. Jiang;  Y. Song and Bayanheshig
浏览  |  Adobe PDF(4373Kb)  |  收藏  |  浏览/下载：291/95  |  提交时间：2018/06/13
Profile online detection for two-dimensional stage x axis mirror in scanning exposure systems 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 1
作者:  Liu, Z.;  W. Li;  Bayanheshig;  Y. Song;  S. Jiang;  X. Li and Q. Lu
浏览  |  Adobe PDF(420Kb)  |  收藏  |  浏览/下载：320/98  |  提交时间：2018/06/13
Beam alignment and convergence analysis of scanning beam interference lithography systems 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 12
作者:  Wang, W.;  Bayanheshig;  Y. Song;  S. Jiang and M. Pan
浏览  |  Adobe PDF(1920Kb)  |  收藏  |  浏览/下载：471/86  |  提交时间：2017/09/11
Design and analysis of diamond carrier aerostatic guideway in large diffraction grating ruling engine 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2015, 卷号: 42, 期号: 4
作者:  Song, N.;  S. Feng;  H. Yu;  X. Qi;  Bayanheshig and Y. Tang
浏览  |  Adobe PDF(1451Kb)  |  收藏  |  浏览/下载：354/85  |  提交时间：2016/08/24