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Principle and optimum analysis of small near-infrared spectrometers based on digital micromirror device 期刊论文
Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2021, 卷号: 50, 期号: 2
作者:  H. Liu;  Y. Liu;  Y. Song;  Z. Zhong;  L. Kong and H. Liu
浏览  |  Adobe PDF(1634Kb)  |  收藏  |  浏览/下载：119/56  |  提交时间：2022/06/13
Algorithm for Sub-Pixel Detection of Fringe Image Displacement Based on Gray-Level Interpolation 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2021, 卷号: 41, 期号: 10
作者:  S. Li;  X. Gao;  Z. Liu and W. Hu
浏览  |  Adobe PDF(4210Kb)  |  收藏  |  浏览/下载：119/55  |  提交时间：2022/06/13
Overview of 2D grating displacement measurement technology 期刊论文
Chinese Optics, 2020, 卷号: 13, 期号: 6, 页码: 1224-1238
作者:  Y.-F. Yin,Z.-W. Liu,J. Jirigalantu,H.-Z. Yu,W. Wang,X.-T. Li,H. Bao,W.-H. Li and Q. Hao
浏览  |  Adobe PDF(6951Kb)  |  收藏  |  浏览/下载：88/25  |  提交时间：2021/07/06
Perfect tracking control for fast-steering mirror driven by voice coil motor 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2020, 卷号: 28, 期号: 9, 页码: 1997-2006
作者:  F.-C. Wang,Y.-T. Wang and D.-P. Tian
浏览  |  Adobe PDF(3952Kb)  |  收藏  |  浏览/下载：165/54  |  提交时间：2021/07/06
Optical coatings for projection objective immersion lithography 期刊论文
Chinese Optics, 2018, 卷号: 11, 期号: 5, 页码: 745-764
作者:  Bi, Dan-Dan;  Zhang, Li-Chao;  Shi, Guang
浏览  |  Adobe PDF(2727Kb)  |  收藏  |  浏览/下载：295/118  |  提交时间：2019/09/17
Optical films  Integrated circuit manufacture  Irradiation  Lithography  Optical coatings  Optical systems  
Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2018, 卷号: 45, 期号: 8
作者:  Zhang, Lu;  Xiang, Yang
Adobe PDF(685Kb)  |  收藏  |  浏览/下载：283/111  |  提交时间：2019/09/17
Shearing  Aberrations  Errors  Interferometers  Measurement  Wavefronts  
Study on High Precision Magnification Measurement of Imaging Systems 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2018, 卷号: 38, 期号: 7
作者:  Dong, Guanji;  Tang, Feng;  Wang, Xiangzhao;  Feng, Peng;  Guo, Fudong;  Peng, Changzhe
Adobe PDF(4169Kb)  |  收藏  |  浏览/下载：289/108  |  提交时间：2019/09/17
Interferometry  CCD cameras  Diffraction  Imaging systems  Measurement  Uncertainty analysis  
High-precision position control of a gene sequencer motion stage 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2018, 卷号: 26, 期号: 10, 页码: 2455-2462
作者:  Fu, Yun-Bo;  Guo, Tong-Jian
Adobe PDF(854Kb)  |  收藏  |  浏览/下载：366/164  |  提交时间：2019/09/17
Controllers  Computer control systems  Equations of motion  Frequency domain analysis  Genes  Permanent magnets  Position control  Synchronous motors  
Grating Lateral Shearing Interferometry for Suppressing Zero-Order Crosstalk 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2018, 卷号: 45, 期号: 5
作者:  Fang, Chao;  Xiang, Yang;  Qi, Keqi
Adobe PDF(403Kb)  |  收藏  |  浏览/下载：295/110  |  提交时间：2019/09/17
Aberrations  Crosstalk  Interferometry  Measurement  Photolithography  Shearing  Wave interference  Wavefronts  
Design and experiment of active compensation system for thermal aberration of lithographic lens 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2017, 卷号: 37, 期号: 3
作者:  Dong, L.;  Q. Cui;  P. Li and L. Zhao
Adobe PDF(4130Kb)  |  收藏  |  浏览/下载：352/113  |  提交时间：2018/06/13