Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Grating Lateral Shearing Interferometry for Suppressing Zero-Order Crosstalk | |
Fang, Chao![]() ![]() ![]() | |
2018 | |
发表期刊 | Zhongguo Jiguang/Chinese Journal of Lasers |
ISSN | 2587025 |
卷号 | 45期号:5 |
摘要 | In order to reduce the difficulties in manufacture and assembly of the spatial filter with two square windows in image plane, we propose a grating lateral shearing interferometry based on a nine step phase shifting method, which is used to calibrate the zero-order phase error. The zero-order crosstalk could be eliminated only by a variable space filter. The parameters are designed and the principle verification system is completed for a projection lithography lens with numerical aperture of 0.125. Then the wavefront aberration measurement of this lens is achieved by the restoration of shearing phase and the reconstruction of wavefront. The results show that the wavefront aberration is less than 20.32 nm. The repeatability precision of the grating lateral shearing interferometer is measured. The root-mean-square value of the repeatability precision is 0.1303 nm, which shows the performance of this system is well. 2018, Chinese Lasers Press. All right reserved. |
关键词 | Aberrations Crosstalk Interferometry Measurement Photolithography Shearing Wave interference Wavefronts |
DOI | 10.3788/CJL201845.0504002 |
收录类别 | EI |
引用统计 | 正在获取...
|
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/60677 |
专题 | 中国科学院长春光学精密机械与物理研究所 |
推荐引用方式 GB/T 7714 | Fang, Chao,Xiang, Yang,Qi, Keqi. Grating Lateral Shearing Interferometry for Suppressing Zero-Order Crosstalk[J]. Zhongguo Jiguang/Chinese Journal of Lasers,2018,45(5). |
APA | Fang, Chao,Xiang, Yang,&Qi, Keqi.(2018).Grating Lateral Shearing Interferometry for Suppressing Zero-Order Crosstalk.Zhongguo Jiguang/Chinese Journal of Lasers,45(5). |
MLA | Fang, Chao,et al."Grating Lateral Shearing Interferometry for Suppressing Zero-Order Crosstalk".Zhongguo Jiguang/Chinese Journal of Lasers 45.5(2018). |
条目包含的文件 | 下载所有文件 | |||||
文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
Grating Lateral Shea(403KB) | 期刊论文 | 出版稿 | 开放获取 | CC BY-NC-SA | 浏览 下载 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论