Grating Lateral Shearing Interferometry for Suppressing Zero-Order Crosstalk

doi:10.3788/CJL201845.0504002

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	Grating Lateral Shearing Interferometry for Suppressing Zero-Order Crosstalk
	Fang, Chao; Xiang, Yang; Qi, Keqi
	2018
发表期刊	Zhongguo Jiguang/Chinese Journal of Lasers
ISSN	2587025
卷号	45 期号:5
摘要	In order to reduce the difficulties in manufacture and assembly of the spatial filter with two square windows in image plane, we propose a grating lateral shearing interferometry based on a nine step phase shifting method, which is used to calibrate the zero-order phase error. The zero-order crosstalk could be eliminated only by a variable space filter. The parameters are designed and the principle verification system is completed for a projection lithography lens with numerical aperture of 0.125. Then the wavefront aberration measurement of this lens is achieved by the restoration of shearing phase and the reconstruction of wavefront. The results show that the wavefront aberration is less than 20.32 nm. The repeatability precision of the grating lateral shearing interferometer is measured. The root-mean-square value of the repeatability precision is 0.1303 nm, which shows the performance of this system is well. 2018, Chinese Lasers Press. All right reserved.
关键词	Aberrations Crosstalk Interferometry Measurement Photolithography Shearing Wave interference Wavefronts
DOI	10.3788/CJL201845.0504002
收录类别	EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/60677
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Fang, Chao,Xiang, Yang,Qi, Keqi. Grating Lateral Shearing Interferometry for Suppressing Zero-Order Crosstalk[J]. Zhongguo Jiguang/Chinese Journal of Lasers,2018,45(5).
APA	Fang, Chao,Xiang, Yang,&Qi, Keqi.(2018).Grating Lateral Shearing Interferometry for Suppressing Zero-Order Crosstalk.Zhongguo Jiguang/Chinese Journal of Lasers,45(5).
MLA	Fang, Chao,et al."Grating Lateral Shearing Interferometry for Suppressing Zero-Order Crosstalk".Zhongguo Jiguang/Chinese Journal of Lasers 45.5(2018).

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