Study on High Precision Magnification Measurement of Imaging Systems

doi:10.3788/AOS201838.0712007

CIOMP OpenIR

	Study on High Precision Magnification Measurement of Imaging Systems
	Dong, Guanji; Tang, Feng; Wang, Xiangzhao; Feng, Peng; Guo, Fudong; Peng, Changzhe
	2018
发表期刊	Guangxue Xuebao/Acta Optica Sinica
ISSN	2532239
卷号	38 期号:7
摘要	In the view of the problem that there is no high precision universal magnification measurement methods and apparatus at present, a high precision magnification measuring method for imaging system based on double fiber point-diffraction interferometer is proposed. The separation distance between two fibers in object plane and the separation distance between the fibers' imaging points in image plane are measured with nanometer accuracy by analyzing the quantitative relationship among the separation distance between double point source, spatial location of CCD camera and the Zernike polynomial coefficients of the phase distribution of the point-diffraction interference field. And then, high precision magnification measurement is achieved. Simulation and experimental verification have been carried out to demonstrate the feasibility and stability of the proposed measuring method. The results show that the expanded uncertainty of the magnification measurement is 2.6410-6. The proposed method has the merits of high accuracy, high efficiency and high reliability. It can be used to measure the magnification of high accuracy imaging system with ultra-high precision, such as microscope objectives and lithographic projection lens. 2018, Chinese Lasers Press. All right reserved.
关键词	Interferometry CCD cameras Diffraction Imaging systems Measurement Uncertainty analysis
DOI	10.3788/AOS201838.0712007
收录类别	EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/60822
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Dong, Guanji,Tang, Feng,Wang, Xiangzhao,et al. Study on High Precision Magnification Measurement of Imaging Systems[J]. Guangxue Xuebao/Acta Optica Sinica,2018,38(7).
APA	Dong, Guanji,Tang, Feng,Wang, Xiangzhao,Feng, Peng,Guo, Fudong,&Peng, Changzhe.(2018).Study on High Precision Magnification Measurement of Imaging Systems.Guangxue Xuebao/Acta Optica Sinica,38(7).
MLA	Dong, Guanji,et al."Study on High Precision Magnification Measurement of Imaging Systems".Guangxue Xuebao/Acta Optica Sinica 38.7(2018).

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