CIOMP OpenIR
Optical coatings for projection objective immersion lithography
Bi, Dan-Dan; Zhang, Li-Chao; Shi, Guang
2018
发表期刊Chinese Optics
ISSN20951531
卷号11期号:5页码:745-764
摘要The deep ultraviolet lithography is currently a main method for integrated circuit manufacture. The immersive projection objective must be used to increase resolution of the optical system for realization of smaller component feature dimensions. Therefore a number of rigorous requirements for optical coating component are put forward. In this paper we present designs of the film material and film system applicable to immersive lithographical system as well as the large angle polarization-maintaining film system required for optical systems at high NA. Key issues about immersion environment adaptability, hydrophobicity and anti-contamination of the immersion coating most critical to the objective are discussed. Laser irradiation lifetime of the coated components especially in the immersion environment that is an important factor to evaluate performance of the immersive lithographical system is analyzed. 2018, China Science Publishing & Media LTD. All right reserved.
关键词Optical films Integrated circuit manufacture Irradiation Lithography Optical coatings Optical systems
DOI10.3788/CO.20181105.0745
收录类别EI
引用统计
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/60746
专题中国科学院长春光学精密机械与物理研究所
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GB/T 7714
Bi, Dan-Dan,Zhang, Li-Chao,Shi, Guang. Optical coatings for projection objective immersion lithography[J]. Chinese Optics,2018,11(5):745-764.
APA Bi, Dan-Dan,Zhang, Li-Chao,&Shi, Guang.(2018).Optical coatings for projection objective immersion lithography.Chinese Optics,11(5),745-764.
MLA Bi, Dan-Dan,et al."Optical coatings for projection objective immersion lithography".Chinese Optics 11.5(2018):745-764.
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