Optical coatings for projection objective immersion lithography

doi:10.3788/CO.20181105.0745

CIOMP OpenIR

	Optical coatings for projection objective immersion lithography
	Bi, Dan-Dan; Zhang, Li-Chao; Shi, Guang
	2018
发表期刊	Chinese Optics
ISSN	20951531
卷号	11 期号:5 页码:745-764
摘要	The deep ultraviolet lithography is currently a main method for integrated circuit manufacture. The immersive projection objective must be used to increase resolution of the optical system for realization of smaller component feature dimensions. Therefore a number of rigorous requirements for optical coating component are put forward. In this paper we present designs of the film material and film system applicable to immersive lithographical system as well as the large angle polarization-maintaining film system required for optical systems at high NA. Key issues about immersion environment adaptability, hydrophobicity and anti-contamination of the immersion coating most critical to the objective are discussed. Laser irradiation lifetime of the coated components especially in the immersion environment that is an important factor to evaluate performance of the immersive lithographical system is analyzed. 2018, China Science Publishing & Media LTD. All right reserved.
关键词	Optical films Integrated circuit manufacture Irradiation Lithography Optical coatings Optical systems
DOI	10.3788/CO.20181105.0745
收录类别	EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/60746
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Bi, Dan-Dan,Zhang, Li-Chao,Shi, Guang. Optical coatings for projection objective immersion lithography[J]. Chinese Optics,2018,11(5):745-764.
APA	Bi, Dan-Dan,Zhang, Li-Chao,&Shi, Guang.(2018).Optical coatings for projection objective immersion lithography.Chinese Optics,11(5),745-764.
MLA	Bi, Dan-Dan,et al."Optical coatings for projection objective immersion lithography".Chinese Optics 11.5(2018):745-764.

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