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Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 8
作者:  Kuang, S.-Q.;  C. Zhang;  Y.-M. Wang;  X.-Y. Zhou and Y. Xie
浏览  |  Adobe PDF(867Kb)  |  收藏  |  浏览/下载：311/99  |  提交时间：2018/06/13
Self-calibrated spectral radiance standard source 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 8
作者:  Li, F.-T.;  Z.-G. Li;  X.-X. Wang;  J.-B. Wang and C. Lin
浏览  |  Adobe PDF(400Kb)  |  收藏  |  浏览/下载：316/103  |  提交时间：2018/06/13
Research on high performance light trap technology for PST test 期刊论文
Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2017, 卷号: 46, 期号: 1
作者:  Cao, Z. and Y. Fu
浏览  |  Adobe PDF(667Kb)  |  收藏  |  浏览/下载：311/90  |  提交时间：2018/06/08
Impact of carbon contamination cleaning technologies on reflectivity of extreme ultraviolet lithography optics 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 3
作者:  Wang, Y.;  Q. Lu and Y. Gao
浏览  |  Adobe PDF(284Kb)  |  收藏  |  浏览/下载：373/116  |  提交时间：2018/06/13
Cleaning of carbon contamination on multilayer optics of EUVL 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 11
作者:  Song, Y.;  Q.-P. Lu;  X.-P. Gong;  Y. Wang and Z.-Q. Peng
浏览  |  Adobe PDF(603Kb)  |  收藏  |  浏览/下载：314/113  |  提交时间：2018/06/13
Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2017, 卷号: 37, 期号: 6
作者:  Zhang, C.;  J. Zhang;  Y. Wang;  S. Kuang and Y. Xie
浏览  |  Adobe PDF(1065Kb)  |  收藏  |  浏览/下载：312/88  |  提交时间：2018/06/13
Integrated design to complement aberrations of spherical focusing mirrors and concave holographic gratings in spectrometers 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2016, 卷号: 36, 期号: 6
作者:  Zhao, X.;  Bayanheshig;  W. Li;  Y. Jiang and S. Yang
浏览  |  Adobe PDF(594Kb)  |  收藏  |  浏览/下载：342/95  |  提交时间：2017/09/11
Image quality evaluation of Wolter X-ray nested telescope 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2016, 卷号: 36, 期号: 3
作者:  Zhao, D.;  B. Chen;  P. Liu and L. He
浏览  |  Adobe PDF(1495Kb)  |  收藏  |  浏览/下载：346/79  |  提交时间：2017/09/11
Optical design of high-numerical aperture lithographic lenses 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 4
作者:  Xu, M.-F.;  W.-B. Pang;  X.-R. Xu;  X.-H. Wang and W. Huang
浏览  |  Adobe PDF(487Kb)  |  收藏  |  浏览/下载：321/86  |  提交时间：2017/09/11
Radiation calibration of EUV space cameras 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 5
作者:  He, L.-P.;  B. Chen;  H.-J. Zhang;  S.-J. Liu and X.-G. Wang
浏览  |  Adobe PDF(333Kb)  |  收藏  |  浏览/下载：367/119  |  提交时间：2017/09/11