| Capacitive Sensing and Electrostatic Control System Design and Analysis With a Torsion Pendulum 期刊论文 Ieee Access, 2020, 卷号: 8, 页码: 1021-1030 作者: Y. K. Wang,K. Q. Qi,S. X. Wang,W. Li,Z. Li and Z. Wang 浏览  |  Adobe PDF(2149Kb)  |  收藏  |  浏览/下载:174/52  |  提交时间:2021/07/06 |