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Design and Assessment of a 6-DOF Micro/Nanopositioning System 期刊论文
Ieee-Asme Transactions on Mechatronics, 2019, 卷号: 24, 期号: 5, 页码: 2097-2107
作者:  D.F.Zhang;  P.Z.Li;  J.G.Zhang;  H.N.Chen;  K.Guo;  M.Y.Ni
浏览  |  Adobe PDF(4106Kb)  |  收藏  |  浏览/下载：143/55  |  提交时间：2020/08/24
Fasteners,Solid modeling,Optics,Physics,Actuators,Manufacturing,processes,End effectors,Flexure mechanisms,mechanical design,micro,nanopositioning,parallel positioning system,six degree-of-freedom,(6-DOF),purpose positioner-fixture,parallel manipulator,stage,mechanism,2-dof,3-dof,Automation & Control Systems,Engineering  
Simple and compact grating-based heterodyne interferometer with the Littrow configuration for high-accuracy and long-range measurement of two-dimensional displacement 期刊论文
APPLIED OPTICS, 2018, 卷号: 57, 期号: 31, 页码: 9455-9463
作者:  Lv, Qiang;  Liu, Zhaowu;  Wang, Wei;  Li, Xiaotian;  Li, Shuo;  Song, Ying;  Yu, Hongzhu;  Bayanheshig;  Li, Wenhao
浏览  |  Adobe PDF(1611Kb)  |  收藏  |  浏览/下载：399/112  |  提交时间：2019/08/26
laser  nonlinearity  encoder  errors  stage  Optics