| Jones pupil decomposition and its lithographic imaging impacts 期刊论文 Applied Optics, 2021, 卷号: 60, 期号: 5, 页码: 1357-1365 作者: Z. Niu; M. Ding; J. Jiang; H. Shang; S. Zhu; F. Zhang; W. Shi; A. Zeng and H. Huang 浏览  |  Adobe PDF(10638Kb)  |  收藏  |  浏览/下载:99/26  |  提交时间:2022/06/13 |