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Jones pupil decomposition and its lithographic imaging impacts 期刊论文
Applied Optics, 2021, 卷号: 60, 期号: 5, 页码: 1357-1365
Authors:  Z. Niu;  M. Ding;  J. Jiang;  H. Shang;  S. Zhu;  F. Zhang;  W. Shi;  A. Zeng and H. Huang
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