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Signal-to-noise ratio enhancement of a Hadamard transform spectrometer using a two-dimensional slit-array 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 25
作者:  Chi, M. B.;  Y. H. Wu;  F. Qian;  P. Hao;  W. C. Zhou and Y. S. Liu
浏览  |  Adobe PDF(699Kb)  |  收藏  |  浏览/下载:327/105  |  提交时间:2018/06/08
Low-stress and high-reflectance Mo/Si multilayers for extreme ultraviolet lithography by magnetron sputtering deposition with bias assistance 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 26
作者:  Yu, B.;  C. S. Jin;  S. Yao;  C. Li;  Y. Liu;  F. Zhou;  B. Y. Guo;  H. Wang;  Y. Xie and L. P. Wang
浏览  |  Adobe PDF(1006Kb)  |  收藏  |  浏览/下载:288/103  |  提交时间:2018/06/13