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Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
作者:  Wang, W.;  S. Jiang;  Y. Song and Bayanheshig
Adobe PDF(4373Kb)  |  收藏  |  浏览/下载:286/91  |  提交时间:2018/06/13
Profile online detection for two-dimensional stage x axis mirror in scanning exposure systems 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 1
作者:  Liu, Z.;  W. Li;  Bayanheshig;  Y. Song;  S. Jiang;  X. Li and Q. Lu
Adobe PDF(420Kb)  |  收藏  |  浏览/下载:316/94  |  提交时间:2018/06/13
Integrated design to complement aberrations of spherical focusing mirrors and concave holographic gratings in spectrometers 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2016, 卷号: 36, 期号: 6
作者:  Zhao, X.;  Bayanheshig;  W. Li;  Y. Jiang and S. Yang
Adobe PDF(594Kb)  |  收藏  |  浏览/下载:337/92  |  提交时间:2017/09/11
Study on the Effects and Compensation Effect of Recording Parameters Error on Imaging Performance of Holographic Grating in On-Line Spectral Diagnose 期刊论文
Spectroscopy and Spectral Analysis, 2016, 卷号: 36, 期号: 3
作者:  Jiang, Y. X.;  Bayanheshig;  S. Yang;  X. L. Zhao;  N. Wu and W. H. Li
浏览  |  Adobe PDF(524Kb)  |  收藏  |  浏览/下载:276/69  |  提交时间:2017/09/11
Beam alignment and convergence analysis of scanning beam interference lithography systems 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 12
作者:  Wang, W.;  Bayanheshig;  Y. Song;  S. Jiang and M. Pan
浏览  |  Adobe PDF(1920Kb)  |  收藏  |  浏览/下载:443/82  |  提交时间:2017/09/11
Effect of period setting value on printed phase in scanning beam interference lithography system 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2014, 卷号: 34, 期号: 9
作者:  Jiang S.;  Bayanheshig;  Li W.;  Song Y.;  Pan M.
caj(447Kb)  |  收藏  |  浏览/下载:368/54  |  提交时间:2015/04/24
Optical system design of large entrance pupil catadioptric star sensor 期刊论文
Zhongguo Jiguang/中文 Journal of Lasers, 2014, 卷号: 41, 期号: 7
作者:  Lu B.;  Liu W.;  Zhang D.;  Jiang S.;  Kang Y.;  Feng R.
caj(655Kb)  |  收藏  |  浏览/下载:251/44  |  提交时间:2015/04/24