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Design method for off-axis aspheric reflective optical system with extremely low aberration and large field of view 期刊论文
Applied Optics, 2020, 卷号: 59, 期号: 32, 页码: 10185-10193
作者:  Y. Wu,L. P. Wang,J. Yu,B. Yu and C. S. Jin
浏览  |  Adobe PDF(4372Kb)  |  收藏  |  浏览/下载：122/56  |  提交时间：2021/07/06
Low-stress and high-reflectance Mo/Si multilayers for extreme ultraviolet lithography by magnetron sputtering deposition with bias assistance 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 26
作者:  Yu, B.;  C. S. Jin;  S. Yao;  C. Li;  Y. Liu;  F. Zhou;  B. Y. Guo;  H. Wang;  Y. Xie and L. P. Wang
浏览  |  Adobe PDF(1006Kb)  |  收藏  |  浏览/下载：289/103  |  提交时间：2018/06/13