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Tolerance assurance of interferometer for optical HCB process 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2018, 卷号: 26, 期号: 8, 页码: 1945-1953
作者:  Yao, Dong;  Li, Yu-Peng;  Zhao, Ya;  Wang, Zhi;  Sha, Wei;  Wang, Yong-Xian
浏览  |  Adobe PDF(637Kb)  |  收藏  |  浏览/下载：288/109  |  提交时间：2019/09/17
Interferometers  Catalysis  Degrees of freedom (mechanics)  Fillers  Gravity waves  Laser interferometry  Position control  
Online detection of profile deviation for nano precision 2-D stage mirror 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 9
作者:  Liu, Z.-W.;  W.-H. Li;  J.-K. Wang;  S. Jiang;  Y. Song;  M.-Z. Pan and Bayanheshig
Adobe PDF(624Kb)  |  收藏  |  浏览/下载：307/88  |  提交时间：2017/09/11
Structure design of nanometer positioning stage with a large stroke 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 5
作者:  Chen, Q.
Adobe PDF(791Kb)  |  收藏  |  浏览/下载：341/108  |  提交时间：2017/09/11
Yaw angle correction of grating line based on single piezoelectric actuator 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2014, 卷号: 22, 期号: 8, 页码: 2039-2046
作者:  Li X.-T.;  Qi X.-D.;  Yu H.-L.;  Gao J.-X.;  Feng S.-L.;  Bayanheshig
Adobe PDF(1572Kb)  |  收藏  |  浏览/下载：302/81  |  提交时间：2015/04/24
Influence of running accuracy of ruling carriage system on grating spectrum performance 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2014, 卷号: 22, 期号: 10, 页码: 2674-2682
作者:  Yang C.;  Yu H.-L.;  Feng S.-L.;  Li X.-T.;  Qi X.-D.;  Jiang S.;  Tang Y.-G.
浏览  |  Adobe PDF(1639Kb)  |  收藏  |  浏览/下载：338/120  |  提交时间：2015/04/24