Tolerance assurance of interferometer for optical HCB process

doi:10.3788/OPE.20182608.1945

CIOMP OpenIR

	Tolerance assurance of interferometer for optical HCB process
	Yao, Dong; Li, Yu-Peng; Zhao, Ya; Wang, Zhi; Sha, Wei; Wang, Yong-Xian
	2018
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
ISSN	1004924X
卷号	26 期号:8 页码:1945-1953
摘要	Space interference measurement system is an important part of gravitational wave detection in space. This paper introduces the composition and working principle of a differential frequency interferometer made of only glass. To address the problem of matching and aligning double coherent beams in differential frequency interferometers, we introduce a method that can guarantee the angular and position tolerance of double frequency laser interferometers; this method is suitable for the hydroxide catalysis bonding assembly process. In the proposed method, an observation system is combined with a microadjustment mechanism. First, the monitoring system measures the relative position of light rays in real time. Next, the microadjustment mechanism adjusts the target device to micron-order resolution along three degrees of freedom, including two-dimensional planar movement and one-dimensional axial rotation. The monitoring and adjustment processes are iterated to achieve high-precision position and angular control of the optical components. Manual adjustments can ensure an angular tolerance and a position tolerance greater than 80 rad and 85 m, respectively. This scheme can meet the accuracy requirements of differential frequency laser interferometers and lay the foundation for achieving higher accuracy in the future. 2018, Science Press. All right reserved.
关键词	Interferometers Catalysis Degrees of freedom (mechanics) Fillers Gravity waves Laser interferometry Position control
DOI	10.3788/OPE.20182608.1945
收录类别	EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/60841
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Yao, Dong,Li, Yu-Peng,Zhao, Ya,et al. Tolerance assurance of interferometer for optical HCB process[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2018,26(8):1945-1953.
APA	Yao, Dong,Li, Yu-Peng,Zhao, Ya,Wang, Zhi,Sha, Wei,&Wang, Yong-Xian.(2018).Tolerance assurance of interferometer for optical HCB process.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,26(8),1945-1953.
MLA	Yao, Dong,et al."Tolerance assurance of interferometer for optical HCB process".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 26.8(2018):1945-1953.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Tolerance assurance （637KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	浏览下载