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Low-stress and high-reflectance Mo/Si multilayers for extreme ultraviolet lithography by magnetron sputtering deposition with bias assistance 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 26
作者:  Yu, B.;  C. S. Jin;  S. Yao;  C. Li;  Y. Liu;  F. Zhou;  B. Y. Guo;  H. Wang;  Y. Xie and L. P. Wang
浏览  |  Adobe PDF(1006Kb)  |  收藏  |  浏览/下载:291/104  |  提交时间:2018/06/13
Removal of all mosaic grating errors in a single-interferometer system by a phase-difference reference window 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 28
作者:  Lu, Y. X.;  X. D. Qi;  X. T. Li;  H. L. Yu;  S. Jiang;  H. Bayan and L. Yin
浏览  |  Adobe PDF(749Kb)  |  收藏  |  浏览/下载:293/65  |  提交时间:2017/09/11
Ruling of echelles and gratings with a diamond tool by the torque equilibrium method 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 28
作者:  Jirigalantu;  X. T. Li;  S. W. Zhang;  X. T. Mi;  J. X. Gao;  Bayanheshig;  X. D. Qi and Y. G. Tang
浏览  |  Adobe PDF(1388Kb)  |  收藏  |  浏览/下载:359/72  |  提交时间:2017/09/11
Influence of substrate temperatures on the properties of GdF3 thin films with quarter-wave thickness in the ultraviolet region 期刊论文
Applied Optics, 2015, 卷号: 54, 期号: 16, 页码: 5117-5122
作者:  Jin, J. C.;  C. S. Jin;  C. Li;  W. Y. Deng and S. Yao
浏览  |  Adobe PDF(684Kb)  |  收藏  |  浏览/下载:243/86  |  提交时间:2016/07/15
Compact KTA-based intracavity optical parametric oscillator driven by a passively Q-switched Nd : GdVO4 laser 期刊论文
Applied Optics, 2008, 卷号: 47, 期号: 23, 页码: 4287-4291
作者:  Miao J. G.;  Peng J. Y.;  Wang B. S.;  Tan H. M.
Adobe PDF(1515Kb)  |  收藏  |  浏览/下载:353/60  |  提交时间:2012/10/21
High-power high-repetition-rate UV light at 355 nm generated by a diode-end-pumped passively Q-switched Nd : YAG laser 期刊论文
Applied Optics, 2007, 卷号: 46, 期号: 15, 页码: 2975-2979
作者:  Jia F. Q.;  Zheng Q.;  Xue Q. H.;  Bu Y. K.;  Qian L. S.
Adobe PDF(2388Kb)  |  收藏  |  浏览/下载:539/114  |  提交时间:2012/10/21