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Impact of carbon contamination cleaning technologies on reflectivity of extreme ultraviolet lithography optics 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 3
作者:  Wang, Y.;  Q. Lu and Y. Gao
浏览  |  Adobe PDF(284Kb)  |  收藏  |  浏览/下载:348/106  |  提交时间:2018/06/13
Cleaning of carbon contamination on multilayer optics of EUVL 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 11
作者:  Song, Y.;  Q.-P. Lu;  X.-P. Gong;  Y. Wang and Z.-Q. Peng
浏览  |  Adobe PDF(603Kb)  |  收藏  |  浏览/下载:306/106  |  提交时间:2018/06/13
Spectral calibration of medical microscopic imaging spectrometer 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 5
作者:  Wei, W.;  J.-C. Cui;  Y.-G. Tang;  C. Sun and M.-Z. Pan
浏览  |  Adobe PDF(476Kb)  |  收藏  |  浏览/下载:327/110  |  提交时间:2017/09/11
Effect of deposition temperature on the structural and surface properties of AlN by plasma enhanced atomic layer deposition 期刊论文
Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2016, 卷号: 45, 期号: 4
作者:  Chen, F.;  X. Fang;  S. Wang;  S. Niu;  F. Fang;  D. Fang;  J. Tang;  X. Wang;  G. Liu and Z. Wei
浏览  |  Adobe PDF(1145Kb)  |  收藏  |  浏览/下载:415/102  |  提交时间:2017/09/11
有机电致发光器件的新型薄膜封装技术研究 期刊论文
光电子.激光, 2014, 期号: 5, 页码: 840-844
作者:  骆杨;  李天骄;  段羽
caj(379Kb)  |  收藏  |  浏览/下载:325/145  |  提交时间:2015/04/17
薄膜封装  水汽透过率(Wvtr)  原子层沉积(Ald)  
A new thin-film encapsulation technology for organic light-emitting devices 期刊论文
Guangdianzi Jiguang/Journal of Optoelectronics Laser, 2014, 卷号: 25, 期号: 5, 页码: 840-844
作者:  Luo Y.;  Li T.-J.;  Duan Y.
caj(379Kb)  |  收藏  |  浏览/下载:223/67  |  提交时间:2015/04/24