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Vane structure optimization method for stray light suppression in a space-based optical system with wide field of view 期刊论文
Optical Engineering, 2019, 卷号: 58, 期号: 10, 页码: 10
作者:  Z.M.Xu;  C.H.Hu;  C.X.Yan;  C.Gu
浏览  |  Adobe PDF(2084Kb)  |  收藏  |  浏览/下载：145/57  |  提交时间：2020/08/24
stray light suppression,space-based optical system,wide of field,bidirectional scattering distribution function,baffle and vane,Optics  
Modeling multilayer coating profiles with defects on EUV collector with grating 期刊论文
Optical Engineering, 2019, 卷号: 58, 期号: 10, 页码: 9
作者:  S.Z.Sun;  C.S.Jin;  B.Yu;  T.Guo;  S.Yao;  W.Y.Deng;  C.Li
浏览  |  Adobe PDF(1912Kb)  |  收藏  |  浏览/下载：116/39  |  提交时间：2020/08/24
EUV collector with grating,multilayer coating profile,coating defects,deposition model,EUV reflectance,lithography,Optics