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Influence and Revising Method of Grating Ruling Engine's Abbe Error on Quality of Grating Wavefront 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
作者:  Mi, X.;  H. Yu;  H. Yu;  X. Qi;  X. Li and Q. Wan
浏览  |  Adobe PDF(3436Kb)  |  收藏  |  浏览/下载：349/123  |  提交时间：2018/06/13
Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
作者:  Wang, W.;  S. Jiang;  Y. Song and Bayanheshig
浏览  |  Adobe PDF(4373Kb)  |  收藏  |  浏览/下载：288/93  |  提交时间：2018/06/13
Profile online detection for two-dimensional stage x axis mirror in scanning exposure systems 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 1
作者:  Liu, Z.;  W. Li;  Bayanheshig;  Y. Song;  S. Jiang;  X. Li and Q. Lu
浏览  |  Adobe PDF(420Kb)  |  收藏  |  浏览/下载：317/95  |  提交时间：2018/06/13
Angle error investigation in laser tracker testing large aspheric mirrors 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 11
作者:  Liu, L.;  X. Chen;  L. Xiong;  F. Zhang and D. Xue
浏览  |  Adobe PDF(567Kb)  |  收藏  |  浏览/下载：348/98  |  提交时间：2017/09/11