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| Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 8 作者: Kuang, S.-Q.; C. Zhang; Y.-M. Wang; X.-Y. Zhou and Y. Xie
浏览  |   Adobe PDF(867Kb)  |   收藏  |  浏览/下载:313/100  |  提交时间:2018/06/13 |
| Electrostatic field assisted micro imprint lithography technology 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 3 作者: Liu, M.-Z.; T.-S. Wang; H.-F. Li; Z.-Y. Liu; Z.-L. Chen and W.-X. Yu
浏览  |   Adobe PDF(947Kb)  |   收藏  |  浏览/下载:340/88  |  提交时间:2018/06/13 |
| Cleaning of carbon contamination on multilayer optics of EUVL 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 11 作者: Song, Y.; Q.-P. Lu; X.-P. Gong; Y. Wang and Z.-Q. Peng
浏览  |   Adobe PDF(603Kb)  |   收藏  |  浏览/下载:314/113  |  提交时间:2018/06/13 |
| Meter-scale thin film coating equipment based on meniscus-coating technology 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 1 作者: Xu, J.; W.-B. Xu; H.-Y. Bu; Z.-W. Lu; Z.-K. Liu; Y.-L. Hong and W.-X. Yu
浏览  |   Adobe PDF(611Kb)  |   收藏  |  浏览/下载:314/111  |  提交时间:2018/06/13 |
| Evaluation of absorption measurement uncertainty of laser calorimeter by exponential method 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 2 作者: Gu, Y.-Q. ; L.-C. Zhang; X.-Y. Wu; L. Mei and G. Shi
浏览  |   Adobe PDF(803Kb)  |   收藏  |  浏览/下载:405/71  |  提交时间:2017/09/11 |
| Scannerless laser active imaging validating system by directly ranging 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 2 作者: Xu, Z.-P.; H.-H. Shen; Y. Yao; G. Li; Y.-L. Song; H.-X. Li; H. Sun and L. Shi
浏览  |   Adobe PDF(572Kb)  |   收藏  |  浏览/下载:428/140  |  提交时间:2017/09/11 |
| Online detection of profile deviation for nano precision 2-D stage mirror 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 9 作者: Liu, Z.-W.; W.-H. Li; J.-K. Wang; S. Jiang; Y. Song; M.-Z. Pan and Bayanheshig
浏览  |   Adobe PDF(624Kb)  |   收藏  |  浏览/下载:318/97  |  提交时间:2017/09/11 |
| Optical design of high-numerical aperture lithographic lenses 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 4 作者: Xu, M.-F.; W.-B. Pang; X.-R. Xu; X.-H. Wang and W. Huang
浏览  |   Adobe PDF(487Kb)  |   收藏  |  浏览/下载:322/87  |  提交时间:2017/09/11 |
| Measurement of transversal magnification for reduced projection system 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 1 作者: Xie, Y. ; L.-P. Wang; B.-Y. Guo; J. Wang; L. Miao; H. Wang and F. Zhou
浏览  |   Adobe PDF(645Kb)  |   收藏  |  浏览/下载:326/81  |  提交时间:2017/09/11 |
| Sub-nanometer precision optical fabrication of CaF2materials 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 11 作者: Zhang, C.-L. ; L. Xu; J. Liu; Z.-L. Ma; F. Wang; Y.-Q. Gu; L. Dai and S.-J. Peng
浏览  |   Adobe PDF(752Kb)  |   收藏  |  浏览/下载:403/113  |  提交时间:2017/09/11 |