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High-efficiency calibration of star sensor based on two-dimensional Dammann grating 期刊论文
Optical Engineering, 2019, 卷号: 58, 期号: 8, 页码: 7
作者:  K.Zhang;  X.Zhong;  W.Wang;  Y.Meng;  C.Ma
浏览  |  Adobe PDF(1593Kb)  |  收藏  |  浏览/下载：216/66  |  提交时间：2020/08/24
star sensor,high-efficiency calibration,Dammann grating,diffraction,Optics  
Modeling multilayer coating profiles with defects on EUV collector with grating 期刊论文
Optical Engineering, 2019, 卷号: 58, 期号: 10, 页码: 9
作者:  S.Z.Sun;  C.S.Jin;  B.Yu;  T.Guo;  S.Yao;  W.Y.Deng;  C.Li
浏览  |  Adobe PDF(1912Kb)  |  收藏  |  浏览/下载：163/48  |  提交时间：2020/08/24
EUV collector with grating,multilayer coating profile,coating defects,deposition model,EUV reflectance,lithography,Optics