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Cleaning of carbon contamination on multilayer optics of EUVL 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 11
作者:  Song, Y.;  Q.-P. Lu;  X.-P. Gong;  Y. Wang and Z.-Q. Peng
Adobe PDF(603Kb)  |  收藏  |  浏览/下载：312/111  |  提交时间：2018/06/13
Evaluation of absorption measurement uncertainty of laser calorimeter by exponential method 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 2
作者:  Gu, Y.-Q.;  L.-C. Zhang;  X.-Y. Wu;  L. Mei and G. Shi
Adobe PDF(803Kb)  |  收藏  |  浏览/下载：402/70  |  提交时间：2017/09/11
Surface modification of 2 m RB-SiC substrate by magnetron sputtering 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 7
作者:  Liu, Z.;  J.-S. Gao;  H. Liu;  X.-Y. Wang and T.-T. Wang
Adobe PDF(1031Kb)  |  收藏  |  浏览/下载：285/87  |  提交时间：2017/09/11
Optical design of high-numerical aperture lithographic lenses 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 4
作者:  Xu, M.-F.;  W.-B. Pang;  X.-R. Xu;  X.-H. Wang and W. Huang
Adobe PDF(487Kb)  |  收藏  |  浏览/下载：320/85  |  提交时间：2017/09/11
Structrual design of detector for optical elements with large aperture 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24
作者:  Huang, B.;  X.-L. Li and H.-Q. Yang
Adobe PDF(2046Kb)  |  收藏  |  浏览/下载：281/102  |  提交时间：2017/09/11
Measurement of transversal magnification for reduced projection system 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 1
作者:  Xie, Y.;  L.-P. Wang;  B.-Y. Guo;  J. Wang;  L. Miao;  H. Wang and F. Zhou
Adobe PDF(645Kb)  |  收藏  |  浏览/下载：323/79  |  提交时间：2017/09/11
Image motion velocity field model of space camera with large field and analysis on three-axis attitude stability of satellite 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 9
作者:  Lu, P.-L.;  Y.-C. Li;  L.-X. Jin;  G.-N. Li;  Y.-N. Wu and W.-H. Wang
浏览  |  Adobe PDF(826Kb)  |  收藏  |  浏览/下载：388/111  |  提交时间：2017/09/11
Sub-nanometer precision optical fabrication of CaF2materials 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 11
作者:  Zhang, C.-L.;  L. Xu;  J. Liu;  Z.-L. Ma;  F. Wang;  Y.-Q. Gu;  L. Dai and S.-J. Peng
浏览  |  Adobe PDF(752Kb)  |  收藏  |  浏览/下载：395/111  |  提交时间：2017/09/11
Linearity calibration platform of capacitive sensors 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 1
作者:  Zhang, D.-F.;  C. Ge;  X.-L. Li;  M.-Y. Ni and K. Guo
浏览  |  Adobe PDF(2131Kb)  |  收藏  |  浏览/下载：324/108  |  提交时间：2017/09/11
Effect of alignment errors of reticle on distortion in lithographic projection lens 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 3
作者:  Yang, W.;  W. Huang and H.-B. Shang
浏览  |  Adobe PDF(1721Kb)  |  收藏  |  浏览/下载：285/81  |  提交时间：2017/09/11