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Design and fabrication of EUV broadband multilayer mirrors with discrete thicknesses 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2018, 卷号: 26, 期号: 10, 页码: 2395-2406
作者:  Kuang, Shang-Qi;  Li, Shuo;  Yang, Hai-Gui;  Huo, Tong-Lin;  Zhou, Hong-Jun
浏览  |  Adobe PDF(985Kb)  |  收藏  |  浏览/下载：486/148  |  提交时间：2019/09/17
Multilayers  Extreme ultraviolet lithography  Fabrication  Mirrors  Reflection  
Design and Fabrication of Broadband Discrete Extreme-ultraviolet Multilayer Based on Quantum State Genetic Algorithm 期刊论文
Guangzi Xuebao/Acta Photonica Sinica, 2018, 卷号: 47, 期号: 4
作者:  Kuang, Shang-Qi;  Zhang, Chao;  Li, Shuo;  Yang, Hai-Gui;  Huo, Tong-Lin;  Zhou, Hong-Jun
浏览  |  Adobe PDF(1699Kb)  |  收藏  |  浏览/下载：482/118  |  提交时间：2019/09/17
Quantum theory  Fabrication  Genetic algorithms  Magnetron sputtering  Multilayers  Reflection  
Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 8
作者:  Kuang, S.-Q.;  C. Zhang;  Y.-M. Wang;  X.-Y. Zhou and Y. Xie
浏览  |  Adobe PDF(867Kb)  |  收藏  |  浏览/下载：330/106  |  提交时间：2018/06/13
Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2017, 卷号: 37, 期号: 6
作者:  Zhang, C.;  J. Zhang;  Y. Wang;  S. Kuang and Y. Xie
浏览  |  Adobe PDF(1065Kb)  |  收藏  |  浏览/下载：323/93  |  提交时间：2018/06/13