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Quality evaluation of solar magnetic field images at EUV wavelengths in digital image correlation method 期刊论文
Journal of Computational Methods in Sciences and Engineering, 2019, 卷号: 19, 期号: 4, 页码: 1109-1123
作者:  Y.Liu;  K.-F.Song;  J.-L.Ma;  X.-D.Wang;  Z.-W.Han
浏览  |  Adobe PDF(8287Kb)  |  收藏  |  浏览/下载：148/39  |  提交时间：2020/08/24
Image quality,Displacement measurement,Extreme ultraviolet lithography,Image analysis,Magnetic fields,Quality control,Strain measurement  
The effect of ultrasonic vibration and surfactant additive on fabrication of 53.5 gr mm silicon echelle grating with low surface roughness in alkaline KOH solution 期刊论文
Ultrasonics Sonochemistry, 2018, 卷号: 40, 页码: 937-943
作者:  Jiao, Q. B.;  Zhu, C. L.;  Tan, X.;  Qi, X. D.;  Bayanheshig
浏览  |  Adobe PDF(1078Kb)  |  收藏  |  浏览/下载：304/104  |  提交时间：2019/09/17
Surface roughness  Silicon echelle grating  Ultrasonic agitation  Surfactant additive  extreme-ultraviolet  si  agitation  alcohol  Acoustics  Chemistry  
Robust design of broadband EUV multilayer using multi-objective evolutionary algorithm 期刊论文
Optics Communications, 2018, 卷号: 410, 页码: 805-810
作者:  Kuang, S. Q.;  Gong, X. P.;  Yang, H. G.
浏览  |  Adobe PDF(1788Kb)  |  收藏  |  浏览/下载：331/119  |  提交时间：2019/09/17
Multilayers  Multilayer design  X-ray  Soft X-rays  Extreme ultraviolet  Thin films  x-ray  genetic algorithm  mirrors  fabrication  reflectivity  optimization  coatings  Optics  
Design and fabrication of EUV broadband multilayer mirrors with discrete thicknesses 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2018, 卷号: 26, 期号: 10, 页码: 2395-2406
作者:  Kuang, Shang-Qi;  Li, Shuo;  Yang, Hai-Gui;  Huo, Tong-Lin;  Zhou, Hong-Jun
浏览  |  Adobe PDF(985Kb)  |  收藏  |  浏览/下载：478/146  |  提交时间：2019/09/17
Multilayers  Extreme ultraviolet lithography  Fabrication  Mirrors  Reflection  
Detection system of multilayer coating microstructure defects based on differential interference contrast confocal microscopy 期刊论文
Chinese Optics, 2018, 卷号: 11, 期号: 2, 页码: 255-264
作者:  Dai, Cen;  Gong, Yan;  Zhang, Hao;  Li, Dian-Meng;  Xue, Jin-Lai
浏览  |  Adobe PDF(2558Kb)  |  收藏  |  浏览/下载：358/118  |  提交时间：2019/09/17
Multilayers  Coatings  Confocal microscopy  Defects  Diffraction  Extreme ultraviolet lithography  Microstructure