| A MEMS based Fabry-Perot accelerometer with high resolution 期刊论文 Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems, 2020, 卷号: 26, 期号: 6, 页码: 1961-1969 作者: M. H. Zhao,K. L. Jiang,H. W. Bai,H. R. Wang and X. Y. Wei
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