A MEMS based Fabry-Perot accelerometer with high resolution

doi:10.1007/s00542-020-04747-3

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	A MEMS based Fabry-Perot accelerometer with high resolution
	M. H. Zhao,K. L. Jiang,H. W. Bai,H. R. Wang and X. Y. Wei
	2020
发表期刊	Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems
ISSN	0946-7076
卷号	26 期号:6 页码:1961-1969
摘要	Optical MEMS has become exceedingly popular because of its high performance and resistance to electromagnetic interference. A MEMS based Fabry-Perot accelerometer consisting of a G-shaped mass-spring structure sensing chip, laser diode, cube beam splitter and photo translating system integrated by 3D printed sensor package is investigated. The sensitivity and resolution calibrated by intensity demodulation method are respectively, 183.793 V/g and 300 ng. The results show that the adopted G-shaped cantilever-mass structure sensing chip combined with the Fabry-Perot interfere technology can obtain good performance, and the 3D printed sensor package makes the interference optical path and accelerometer more robust and portable.
DOI	10.1007/s00542-020-04747-3
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收录类别	SCI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64672
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	M. H. Zhao,K. L. Jiang,H. W. Bai,H. R. Wang and X. Y. Wei. A MEMS based Fabry-Perot accelerometer with high resolution[J]. Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems,2020,26(6):1961-1969.
APA	M. H. Zhao,K. L. Jiang,H. W. Bai,H. R. Wang and X. Y. Wei.(2020).A MEMS based Fabry-Perot accelerometer with high resolution.Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems,26(6),1961-1969.
MLA	M. H. Zhao,K. L. Jiang,H. W. Bai,H. R. Wang and X. Y. Wei."A MEMS based Fabry-Perot accelerometer with high resolution".Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems 26.6(2020):1961-1969.

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