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CIOMP OpenIR

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Analysis and correction of the distortion error in a DMD based scanning lithography system 期刊论文
Optics Communications, 2019, 卷号: 434, 页码: 1-6
作者:  Q.K.Li;  Y.Xiao;  H.Liu;  H.L.Zhang;  J.Xu;  J.H.Li
浏览  |  Adobe PDF(1598Kb)  |  收藏  |  浏览/下载：238/48  |  提交时间：2020/08/24
Microlithography,Lithography,Digital image processing,maskless lithography,fabrication,Optics  
The Improvement on the Performance of DMD Hadamard Transform Near-Infrared Spectrometer by Double Filter Strategy and a New Hadamard Mask 期刊论文
Micromachines, 2019, 卷号: 10, 期号: 2, 页码: 13
作者:  Z.F.Lu;  J.H.Zhang;  H.Liu;  J.L.Xu;  J.H.Li
浏览  |  Adobe PDF(4774Kb)  |  收藏  |  浏览/下载：340/219  |  提交时间：2020/08/24
Spectrometer,infrared,digital micromirror device (DMD),signal-to-noise ratio (SNR),stray light,Science & Technology - Other Topics,Instruments & Instrumentation  
A beam homogenizer for digital micromirror device lithography system based on random freeform microlenses 期刊论文
Optics Communications, 2019, 卷号: 443, 页码: 211-215
作者:  Z.Y.Liu;  H.Liu;  Z.F.Lu;  Q.K.Li;  J.H.Li
浏览  |  Adobe PDF(1582Kb)  |  收藏  |  浏览/下载：159/66  |  提交时间：2020/08/24
Homogenizer,Microlens array,Freeform surface,DMD lithography system,laser,optics