A beam homogenizer for digital micromirror device lithography system based on random freeform microlenses

doi:10.1016/j.optcom.2019.03.049

CIOMP OpenIR

	A beam homogenizer for digital micromirror device lithography system based on random freeform microlenses
	Z.Y.Liu; H.Liu; Z.F.Lu; Q.K.Li; J.H.Li
	2019
发表期刊	Optics Communications
ISSN	0030-4018
卷号	443 页码:211-215
摘要	We report a novel beam homogenizer for digital micromirror device lithography system. Such a beam homogenizer contains only one random freeform microlens array (rfMLA). And the rfMLA consists of different freeform microlenses. By the individual design and irregular arrangement of the microlenses, efficient and uniform beam shaping results have been obtained, and the interference patterns in particular are greatly weakened. Compared with traditional beam homogenizer, the energy efficiency has been increased from 62.00% to 69.70%, and the uniformity for incoherent light and coherent light have been improved from 91.93% to 97.60% and from 79.00% to 94.33%, respectively. rfMLA has great potential for enhancing the performance of DMD lithography system and other optical systems, particularly for the homogenization of the beam and the integration of the system.
关键词	Homogenizer,Microlens array,Freeform surface,DMD lithography system,laser,optics
DOI	10.1016/j.optcom.2019.03.049
收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/63162
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Z.Y.Liu,H.Liu,Z.F.Lu,et al. A beam homogenizer for digital micromirror device lithography system based on random freeform microlenses[J]. Optics Communications,2019,443:211-215.
APA	Z.Y.Liu,H.Liu,Z.F.Lu,Q.K.Li,&J.H.Li.(2019).A beam homogenizer for digital micromirror device lithography system based on random freeform microlenses.Optics Communications,443,211-215.
MLA	Z.Y.Liu,et al."A beam homogenizer for digital micromirror device lithography system based on random freeform microlenses".Optics Communications 443(2019):211-215.

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