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Correcting groove error in gratings ruled on a 500-mm ruling engine using interferometric control 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 21
作者:  Mi, X. T.;  H. L. Yu;  H. Z. Yu;  S. W. Zhang;  X. T. Li;  X. F. Yao;  X. D. Qi;  Bayinhedhig and Q. H. Wan
浏览  |  Adobe PDF(2137Kb)  |  收藏  |  浏览/下载：359/120  |  提交时间：2018/06/13
Low-stress and high-reflectance Mo/Si multilayers for extreme ultraviolet lithography by magnetron sputtering deposition with bias assistance 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 26
作者:  Yu, B.;  C. S. Jin;  S. Yao;  C. Li;  Y. Liu;  F. Zhou;  B. Y. Guo;  H. Wang;  Y. Xie and L. P. Wang
浏览  |  Adobe PDF(1006Kb)  |  收藏  |  浏览/下载：293/104  |  提交时间：2018/06/13
Field experiment and image reconstruction using a Fourier telescopy imaging system over a 600-m-long horizontal path 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 24
作者:  Yu, S. H.;  L. Dong;  X. Y. Liu;  X. D. Lin;  H. R. Megn and X. Zhong
浏览  |  Adobe PDF(2995Kb)  |  收藏  |  浏览/下载：283/57  |  提交时间：2017/09/11
Measuring method of diffraction efficiency for plane grating based on Fourier spectral technology 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 3
作者:  Ma, Z. Y.;  X. D. Qi;  X. T. Li;  S. W. Zhang;  Bayanheshig;  H. Z. Yu;  H. L. Yu and Q. B. Jiao
Adobe PDF(1214Kb)  |  收藏  |  浏览/下载：303/64  |  提交时间：2017/09/11
Removal of all mosaic grating errors in a single-interferometer system by a phase-difference reference window 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 28
作者:  Lu, Y. X.;  X. D. Qi;  X. T. Li;  H. L. Yu;  S. Jiang;  H. Bayan and L. Yin
浏览  |  Adobe PDF(749Kb)  |  收藏  |  浏览/下载：294/66  |  提交时间：2017/09/11