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Study on a wideband, variable aperture, high resolution scatterometer for planar diffraction grating stray light measurement 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 2
作者:  Yang, J.;  R. Zhang;  L. Yin;  C. Sun and T. J. Li
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Correcting groove error in gratings ruled on a 500-mm ruling engine using interferometric control 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 21
作者:  Mi, X. T.;  H. L. Yu;  H. Z. Yu;  S. W. Zhang;  X. T. Li;  X. F. Yao;  X. D. Qi;  Bayinhedhig and Q. H. Wan
浏览  |  Adobe PDF(2137Kb)  |  收藏  |  浏览/下载：358/120  |  提交时间：2018/06/13
Influence and Revising Method of Grating Ruling Engine's Abbe Error on Quality of Grating Wavefront 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
作者:  Mi, X.;  H. Yu;  H. Yu;  X. Qi;  X. Li and Q. Wan
浏览  |  Adobe PDF(3436Kb)  |  收藏  |  浏览/下载：350/124  |  提交时间：2018/06/13
Broadband guided-mode resonant reflectors with quasi-equilateral triangle grating profiles 期刊论文
Optics Express, 2017, 卷号: 25, 期号: 23
作者:  Zhang, S. W.;  Y. H. Ko and R. Magnusson
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Groove shape characteristics of echelle gratings with high diffraction efficiency 期刊论文
Optics Communications, 2017, 卷号: 387
作者:  Zhang, S. W.;  X. T. Mi;  Q. Zhang;  Jirigalantu;  S. L. Feng;  H. L. Yu and X. D. Qi
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Beam Alignment Error and Its Control in Scanning Beam Interference Lithography System 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2017, 卷号: 37, 期号: 7
作者:  Wang, W.;  Bayanheshig;  M. Pan;  Y. Song and W. Li
浏览  |  Adobe PDF(993Kb)  |  收藏  |  浏览/下载：285/89  |  提交时间：2018/06/13
An improved accuracy-measuring method in manufacturing the lead screw of grating ruling engine 期刊论文
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology, 2017, 卷号: 49
作者:  Yao, X. F.;  J. C. Cui;  H. L. Yu;  X. D. Qi;  X. T. Mi;  Y. M. Jiang;  M. J. Wang and X. T. Li
浏览  |  Adobe PDF(3285Kb)  |  收藏  |  浏览/下载：356/83  |  提交时间：2018/06/13
Measuring method of diffraction efficiency for plane grating based on Fourier spectral technology 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 3
作者:  Ma, Z. Y.;  X. D. Qi;  X. T. Li;  S. W. Zhang;  Bayanheshig;  H. Z. Yu;  H. L. Yu and Q. B. Jiao
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A monolithic adjusting mechanism for optical element based on modified 6-PSS parallel mechanism 期刊论文
Sensors and Actuators a-Physical, 2016, 卷号: 251
作者:  Guo, K.;  M. Y. Ni;  H. A. Chen and Y. X. Sui
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Ruling of echelles and gratings with a diamond tool by the torque equilibrium method 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 28
作者:  Jirigalantu;  X. T. Li;  S. W. Zhang;  X. T. Mi;  J. X. Gao;  Bayanheshig;  X. D. Qi and Y. G. Tang
浏览  |  Adobe PDF(1388Kb)  |  收藏  |  浏览/下载：379/77  |  提交时间：2017/09/11