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Profile online detection for two-dimensional stage x axis mirror in scanning exposure systems 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 1
作者:  Liu, Z.;  W. Li;  Bayanheshig;  Y. Song;  S. Jiang;  X. Li and Q. Lu
浏览  |  Adobe PDF(420Kb)  |  收藏  |  浏览/下载:320/98  |  提交时间:2018/06/13
Effect and experiment analysis of first specular reflection error on absolute radiometers 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 4
作者:  Tang, X.;  W. Fang and Y. Wang
Adobe PDF(1257Kb)  |  收藏  |  浏览/下载:328/96  |  提交时间:2017/09/11
Investigation on pure phase modulation characteristics of liquid crystal spatial light modulator at oblique incidence 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 1
作者:  Lu, Q.;  L. Sheng;  X. Zhang;  J. Bai and Y. Qiao
Adobe PDF(3774Kb)  |  收藏  |  浏览/下载:496/132  |  提交时间:2017/09/11
Angle error investigation in laser tracker testing large aspheric mirrors 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 11
作者:  Liu, L.;  X. Chen;  L. Xiong;  F. Zhang and D. Xue
浏览  |  Adobe PDF(567Kb)  |  收藏  |  浏览/下载:385/99  |  提交时间:2017/09/11
Research on temperature distribution of deep ultraviolet lithographic projection objective 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 5
作者:  Yao, C. and Y. Gong
浏览  |  Adobe PDF(8729Kb)  |  收藏  |  浏览/下载:290/113  |  提交时间:2017/09/11