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Electrostatic field assisted micro imprint lithography technology 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 3
作者:  Liu, M.-Z.;  T.-S. Wang;  H.-F. Li;  Z.-Y. Liu;  Z.-L. Chen and W.-X. Yu
浏览  |  Adobe PDF(947Kb)  |  收藏  |  浏览/下载：336/87  |  提交时间：2018/06/13
Cleaning of carbon contamination on multilayer optics of EUVL 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 11
作者:  Song, Y.;  Q.-P. Lu;  X.-P. Gong;  Y. Wang and Z.-Q. Peng
浏览  |  Adobe PDF(603Kb)  |  收藏  |  浏览/下载：312/111  |  提交时间：2018/06/13
Surface modification of 2 m RB-SiC substrate by magnetron sputtering 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 7
作者:  Liu, Z.;  J.-S. Gao;  H. Liu;  X.-Y. Wang and T.-T. Wang
浏览  |  Adobe PDF(1031Kb)  |  收藏  |  浏览/下载：285/87  |  提交时间：2017/09/11
Target filament accurate restoring system in high-energetic particle burst experiment 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2014, 卷号: 22, 期号: 10, 页码: 2779-2786
作者:  Zhang Y.;  Zhong X.;  Xu Z.;  Jin G.
浏览  |  Adobe PDF(1487Kb)  |  收藏  |  浏览/下载：325/76  |  提交时间：2015/04/24